Localised laser joining of glass to silicon with BCB intermediate layer

INIS

• joining 100%
• layers 100%
• glass 100%
• lasers 100%
• silicon 100%
• devices 60%
• bonding 60%
• heating 40%
• cooling 40%
• levels 20%
• substrates 20%
• values 20%
• solutions 20%
• simulation 20%
• rings 20%
• polymers 20%
• environment 20%
• fibers 20%
• beams 20%
• power 20%
• finite element method 20%
• lenses 20%
• sinks 20%
• packaging 20%
• leaks 20%

Engineering

• Intermediate Layer 100%
• Micro-Electro-Mechanical System 100%
• Finite Element Simulation 50%
• Low-Temperature 50%
• Elevated Temperature 50%
• Leak Rate 50%
• Ambient Environment 50%
• Ideal Solution 50%
• Power Laser 50%
• Diode Array 50%
• Focused Laser Beam 50%