Lithium Niobate (LiNbO3) Waveguides for Electromagnetic Pulse (EMP) Sensing

Andrew John Waddie; Adrian Dzipalski; Iain Thurston; Mohammad Reza Taghizadeh

doi:10.1109/JSEN.2016.2569820

Lithium Niobate (LiNbO3) Waveguides for Electromagnetic Pulse (EMP) Sensing

Andrew John Waddie, Adrian Dzipalski, Iain Thurston, Mohammad Reza Taghizadeh

Research output: Contribution to journal › Article › peer-review

3 Citations (Scopus)

438 Downloads (Pure)

Abstract

In this paper, we report on the fabrication and experimental verification of waveguide structures for electromagnetic pulse (EMP) sensing. The waveguides were realized in z-cut lithium niobate (LiNbO3) using the e-beam and photolithographic technique followed by reactive-ion-etching processes. Channel structures with the width of 1 mu m were etched and, after backfilling of the etched channels with amorphous silicon (a-Si), resulted in a single-mode waveguide structure for operation at 1550 nm. The fabricated devices have successfully measured both the peak field strength and the temporal pulse shape of a range of EMPs.

Original language	English
Pages (from-to)	5603-5609
Number of pages	7
Journal	IEEE Sensors Journal
Volume	16
Issue number	14
Early online date	17 May 2016
DOIs	https://doi.org/10.1109/JSEN.2016.2569820
Publication status	Published - 15 Jul 2016

Keywords

Coupled mode analysis
electromagnetic fields
etching
lithium compounds
lithography
optical coupling
optical device fabrication
optical waveguides
OPTICAL-WAVEGUIDES

Access to Document

10.1109/JSEN.2016.2569820

Download pdf
© 2016 IEEE. Personal use of this material is permitted. Permission from IEEE must be obtained for all other uses, in any current or future media, including reprinting/republishing this material for advertising or promotional purposes, creating new collective works, for resale or redistribution to servers or lists, or reuse of any copyrighted component of this work in other works.
Accepted author manuscript, 2.29 MBLicence: All Rights Reserved

Cite this

@article{831d780333234a78882591a02383cdd0,

title = "Lithium Niobate (LiNbO3) Waveguides for Electromagnetic Pulse (EMP) Sensing",

abstract = "In this paper, we report on the fabrication and experimental verification of waveguide structures for electromagnetic pulse (EMP) sensing. The waveguides were realized in z-cut lithium niobate (LiNbO3) using the e-beam and photolithographic technique followed by reactive-ion-etching processes. Channel structures with the width of 1 mu m were etched and, after backfilling of the etched channels with amorphous silicon (a-Si), resulted in a single-mode waveguide structure for operation at 1550 nm. The fabricated devices have successfully measured both the peak field strength and the temporal pulse shape of a range of EMPs.",

keywords = "Coupled mode analysis, electromagnetic fields, etching, lithium compounds, lithography, optical coupling, optical device fabrication, optical waveguides, OPTICAL-WAVEGUIDES",

author = "Waddie, \{Andrew John\} and Adrian Dzipalski and Iain Thurston and Taghizadeh, \{Mohammad Reza\}",

year = "2016",

month = jul,

day = "15",

doi = "10.1109/JSEN.2016.2569820",

language = "English",

volume = "16",

pages = "5603--5609",

journal = "IEEE Sensors Journal",

issn = "1530-437X",

publisher = "IEEE",

number = "14",

}

TY - JOUR

T1 - Lithium Niobate (LiNbO3) Waveguides for Electromagnetic Pulse (EMP) Sensing

AU - Waddie, Andrew John

AU - Dzipalski, Adrian

AU - Thurston, Iain

AU - Taghizadeh, Mohammad Reza

PY - 2016/7/15

Y1 - 2016/7/15

N2 - In this paper, we report on the fabrication and experimental verification of waveguide structures for electromagnetic pulse (EMP) sensing. The waveguides were realized in z-cut lithium niobate (LiNbO3) using the e-beam and photolithographic technique followed by reactive-ion-etching processes. Channel structures with the width of 1 mu m were etched and, after backfilling of the etched channels with amorphous silicon (a-Si), resulted in a single-mode waveguide structure for operation at 1550 nm. The fabricated devices have successfully measured both the peak field strength and the temporal pulse shape of a range of EMPs.

AB - In this paper, we report on the fabrication and experimental verification of waveguide structures for electromagnetic pulse (EMP) sensing. The waveguides were realized in z-cut lithium niobate (LiNbO3) using the e-beam and photolithographic technique followed by reactive-ion-etching processes. Channel structures with the width of 1 mu m were etched and, after backfilling of the etched channels with amorphous silicon (a-Si), resulted in a single-mode waveguide structure for operation at 1550 nm. The fabricated devices have successfully measured both the peak field strength and the temporal pulse shape of a range of EMPs.

KW - Coupled mode analysis

KW - electromagnetic fields

KW - etching

KW - lithium compounds

KW - lithography

KW - optical coupling

KW - optical device fabrication

KW - optical waveguides

KW - OPTICAL-WAVEGUIDES

UR - https://www.scopus.com/pages/publications/84976485851

U2 - 10.1109/JSEN.2016.2569820

DO - 10.1109/JSEN.2016.2569820

M3 - Article

SN - 1530-437X

VL - 16

SP - 5603

EP - 5609

JO - IEEE Sensors Journal

JF - IEEE Sensors Journal

IS - 14

ER -

Lithium Niobate (LiNbO3) Waveguides for Electromagnetic Pulse (EMP) Sensing

Abstract

Keywords

Access to Document

Other files and links

Fingerprint

Cite this