Lithium Niobate (LiNbO3) Waveguides for Electromagnetic Pulse (EMP) Sensing

Andrew John Waddie; Adrian Dzipalski; Iain Thurston; Mohammad Reza Taghizadeh

doi:10.1109/JSEN.2016.2569820

Lithium Niobate (LiNbO3) Waveguides for Electromagnetic Pulse (EMP) Sensing

Andrew John Waddie, Adrian Dzipalski, Iain Thurston, Mohammad Reza Taghizadeh

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Abstract

In this paper, we report on the fabrication and experimental verification of waveguide structures for electromagnetic pulse (EMP) sensing. The waveguides were realized in z-cut lithium niobate (LiNbO3) using the e-beam and photolithographic technique followed by reactive-ion-etching processes. Channel structures with the width of 1 mu m were etched and, after backfilling of the etched channels with amorphous silicon (a-Si), resulted in a single-mode waveguide structure for operation at 1550 nm. The fabricated devices have successfully measured both the peak field strength and the temporal pulse shape of a range of EMPs.

Original language	English
Pages (from-to)	5603-5609
Number of pages	7
Journal	IEEE Sensors Journal
Volume	16
Issue number	14
Early online date	17 May 2016
DOIs	https://doi.org/10.1109/JSEN.2016.2569820
Publication status	Published - 15 Jul 2016

Keywords

Coupled mode analysis
electromagnetic fields
etching
lithium compounds
lithography
optical coupling
optical device fabrication
optical waveguides
OPTICAL-WAVEGUIDES

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10.1109/JSEN.2016.2569820

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title = "Lithium Niobate (LiNbO3) Waveguides for Electromagnetic Pulse (EMP) Sensing",

abstract = "In this paper, we report on the fabrication and experimental verification of waveguide structures for electromagnetic pulse (EMP) sensing. The waveguides were realized in z-cut lithium niobate (LiNbO3) using the e-beam and photolithographic technique followed by reactive-ion-etching processes. Channel structures with the width of 1 mu m were etched and, after backfilling of the etched channels with amorphous silicon (a-Si), resulted in a single-mode waveguide structure for operation at 1550 nm. The fabricated devices have successfully measured both the peak field strength and the temporal pulse shape of a range of EMPs.",

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AU - Taghizadeh, Mohammad Reza

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KW - Coupled mode analysis

KW - electromagnetic fields

KW - etching

KW - lithium compounds

KW - lithography

KW - optical coupling

KW - optical device fabrication

KW - optical waveguides

KW - OPTICAL-WAVEGUIDES

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JO - IEEE Sensors Journal

JF - IEEE Sensors Journal

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Lithium Niobate (LiNbO3) Waveguides for Electromagnetic Pulse (EMP) Sensing

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Keywords

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