Lithium Niobate (LiNbO3) Waveguides for Electromagnetic Pulse (EMP) Sensing

Andrew John Waddie, Adrian Dzipalski, Iain Thurston, Mohammad Reza Taghizadeh

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Abstract

In this paper, we report on the fabrication and experimental verification of waveguide structures for electromagnetic pulse (EMP) sensing. The waveguides were realized in z-cut lithium niobate (LiNbO3) using the e-beam and photolithographic technique followed by reactive-ion-etching processes. Channel structures with the width of 1 mu m were etched and, after backfilling of the etched channels with amorphous silicon (a-Si), resulted in a single-mode waveguide structure for operation at 1550 nm. The fabricated devices have successfully measured both the peak field strength and the temporal pulse shape of a range of EMPs.

Original languageEnglish
Pages (from-to)5603-5609
Number of pages7
JournalIEEE Sensors Journal
Volume16
Issue number14
Early online date17 May 2016
DOIs
Publication statusPublished - 15 Jul 2016

Keywords

  • Coupled mode analysis
  • electromagnetic fields
  • etching
  • lithium compounds
  • lithography
  • optical coupling
  • optical device fabrication
  • optical waveguides
  • OPTICAL-WAVEGUIDES

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