Leak detection methods for glass capped and polymer sealed MEMS packaging

Suzanne Millar, M. P Y Desmulliez, Stewart McCracken

Research output: Contribution to journalArticle

4 Citations (Scopus)

Abstract

This paper presents the limitations of the helium leak test when applied to typical MEMS packages. A novel closed-form expression is presented which allows the determination of the minimum cavity volume package that can be accurately tested using the helium leak test method in conjunction with a standard gross leak test. This expression can be used to find optimum test parameters for packages with cavity volumes greater than 2.6 × 10-3 cm3. Hermeticity testing using FTIR and Raman spectroscopy are considered as potential methods to overcome the limitations of the helium leak test method. © 2011 Springer-Verlag.

Original languageEnglish
Pages (from-to)677-684
Number of pages8
JournalMicrosystem Technologies
Volume17
Issue number4
DOIs
Publication statusPublished - Apr 2011

Fingerprint Dive into the research topics of 'Leak detection methods for glass capped and polymer sealed MEMS packaging'. Together they form a unique fingerprint.

  • Cite this