Leak detection methods for glass capped and polymer sealed MEMS packaging

Suzanne Millar; M. P Y Desmulliez; Stewart McCracken

doi:10.1007/s00542-010-1200-z

Leak detection methods for glass capped and polymer sealed MEMS packaging

Suzanne Millar, M. P Y Desmulliez, Stewart McCracken

School of Engineering & Physical Sciences

Research output: Contribution to journal › Article › peer-review

7 Citations (Scopus)

Abstract

This paper presents the limitations of the helium leak test when applied to typical MEMS packages. A novel closed-form expression is presented which allows the determination of the minimum cavity volume package that can be accurately tested using the helium leak test method in conjunction with a standard gross leak test. This expression can be used to find optimum test parameters for packages with cavity volumes greater than 2.6 × 10^-3 cm³. Hermeticity testing using FTIR and Raman spectroscopy are considered as potential methods to overcome the limitations of the helium leak test method. © 2011 Springer-Verlag.

Original language	English
Pages (from-to)	677-684
Number of pages	8
Journal	Microsystem Technologies
Volume	17
Issue number	4
DOIs	https://doi.org/10.1007/s00542-010-1200-z
Publication status	Published - Apr 2011

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AB - This paper presents the limitations of the helium leak test when applied to typical MEMS packages. A novel closed-form expression is presented which allows the determination of the minimum cavity volume package that can be accurately tested using the helium leak test method in conjunction with a standard gross leak test. This expression can be used to find optimum test parameters for packages with cavity volumes greater than 2.6 × 10-3 cm3. Hermeticity testing using FTIR and Raman spectroscopy are considered as potential methods to overcome the limitations of the helium leak test method. © 2011 Springer-Verlag.

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Leak detection methods for glass capped and polymer sealed MEMS packaging

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