Laser machining of sensing components on the end of optical fibres

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Abstract

Micro-cantilevers play a major role in sensing, especially since the invention of the atomic force microscope. Applications range from surface profiling to bio-medical sensing enabled through coating-activated cantilevers. Current readout methods are based on either optical deflection (of a laser beam reflected from the cantilever surface) or piezo-resistive response (of piezo-electric elements bonded to the cantilever surface). The first of these approaches requires significant space whilst the second is sensitive to electromagnetic effects. An alternative solution is to manufacture a cantilever onto the end of an optical fibre and use interferometry to monitor its deflection; in this paper we describe the development and application of a picosecond-laser machining process to fabricate such a device. The development of techniques to avoid cracking and debris re-deposition during this machining process is described, and a cantilever sensor with excellent optical performance is demonstrated and tested.

Original languageEnglish
Article number045021
Number of pages8
JournalJournal of Micromechanics and Microengineering
Volume23
Issue number4
DOIs
Publication statusPublished - Apr 2013

Keywords

  • CANTILEVER-BASED BIOSENSORS
  • ATOMIC FORCE MICROSCOPE
  • FUSED-SILICA
  • TRANSPARENT MATERIALS
  • TOP CANTILEVERS
  • ABLATION
  • INCUBATION
  • THRESHOLD
  • GLASS
  • BEAM

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