Laser-induced oxidation of silicon

I. W. Boyd, J. I B Wilson, J. L. West

Research output: Contribution to journalArticlepeer-review

30 Citations (Scopus)
Original languageEnglish
Pages (from-to)L173-L176
JournalThin Solid Films
Volume83
Issue number4
Publication statusPublished - 25 Sep 1981

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