Laser-induced oxidation of silicon

I. W. Boyd, J. I B Wilson, J. L. West

Research output: Contribution to journal › Article › peer-review

Cite this

@article{fa042177e91a4be7912c01efb3e6dd37,

title = "Laser-induced oxidation of silicon",

author = "Boyd, {I. W.} and Wilson, {J. I B} and West, {J. L.}",

year = "1981",

month = sep,

day = "25",

language = "English",

volume = "83",

pages = "L173--L176",

journal = "Thin Solid Films",

issn = "0040-6090",

publisher = "Elsevier",

number = "4",

}