Laser annealing for semiconductor devices

I. W. Boyd, J. I B Wilson

Research output: Contribution to journal › Article › peer-review

12 Citations (Scopus)

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@article{f92a18e7142e401da9bb14cbec82ba8c,

title = "Laser annealing for semiconductor devices",

author = "Boyd, {I. W.} and Wilson, {J. I B}",

year = "1980",

doi = "10.1038/287278a0",

language = "English",

volume = "287",

pages = "278--",

journal = "Nature",

issn = "0028-0836",

publisher = "Nature Publishing Group",

number = "5780",

}