Laser ablation and laser direct writing as enabling technologies for the definition of micro-optical elements

A qualitative comparison is made between laser direct writing and laser ablation as enabling technologies for the structuring of multimode waveguides (50×50µm²) and 45° micro-mirrors into an optical layer. A small demonstrator is fabricated that allows us to couple light vertically from a transmitter into an optical layer and from the optical layer to a receiver. The optical layer, a multifunctional acrylate-based photo-polymer, is applied on an FR4-substrate. Multimode waveguides, that carry signals in the plane of the optical layer, are fabricated by means of laser direct writing, a technology that is available at HWU. The 45° micro-mirrors, that provide out-of-plane coupling, are ablated with the laser ablation set-up available at UGent. This set-up contains a KrF-excimer laser (248nm) that can be tilted, which eases the definition of angled facets. Surface roughness measurements are performed on both the optical layer and the micro-mirrors with a non-contact optical profiler. Loss measurements are performed on both the waveguides and the micro-mirrors.