Laser ablation and laser direct writing as enabling technologies for the definition of micro-optical elements

Nina Hendrickx, Himanshu Suyal, Geert Van Steenberge, Aongus McCarthy, Andy Walker, Heidi Ottevaere, Hugo Thienpont, Mohammed Taghizadeh, Peter Van Daele

Research output: Contribution to journalArticle

2 Citations (Scopus)

Abstract

A qualitative comparison is made between laser direct writing and laser ablation as enabling technologies for the structuring of multimode waveguides (50×50µm2) and 45° micro-mirrors into an optical layer. A small demonstrator is fabricated that allows us to couple light vertically from a transmitter into an optical layer and from the optical layer to a receiver. The optical layer, a multifunctional acrylate-based photo-polymer, is applied on an FR4-substrate. Multimode waveguides, that carry signals in the plane of the optical layer, are fabricated by means of laser direct writing, a technology that is available at HWU. The 45° micro-mirrors, that provide out-of-plane coupling, are ablated with the laser ablation set-up available at UGent. This set-up contains a KrF-excimer laser (248nm) that can be tilted, which eases the definition of angled facets. Surface roughness measurements are performed on both the optical layer and the micro-mirrors with a non-contact optical profiler. Loss measurements are performed on both the waveguides and the micro-mirrors.

Original languageEnglish
Article number59561B
Pages (from-to)1-10
Number of pages10
JournalProceedings of SPIE - the International Society for Optical Engineering
Volume5956
DOIs
Publication statusPublished - 2005
EventIntegrated Optics: Theory and Applications - Warsaw, Poland
Duration: 31 Aug 20052 Sep 2005

Keywords

  • Coupling structures
  • Laser ablation
  • Laser direct writing
  • Optical interconnects
  • Optical waveguides

Fingerprint Dive into the research topics of 'Laser ablation and laser direct writing as enabling technologies for the definition of micro-optical elements'. Together they form a unique fingerprint.

  • Cite this

    Hendrickx, N., Suyal, H., Van Steenberge, G., McCarthy, A., Walker, A., Ottevaere, H., Thienpont, H., Taghizadeh, M., & Van Daele, P. (2005). Laser ablation and laser direct writing as enabling technologies for the definition of micro-optical elements. Proceedings of SPIE - the International Society for Optical Engineering, 5956, 1-10. [59561B]. https://doi.org/10.1117/12.622904