Laser ablation and laser direct writing as enabling technologies for the definition of micro-optical elements

Nina Hendrickx, Himanshu Suyal, Geert Van Steenberge, Aongus McCarthy, Andy Walker, Heidi Ottevaere, Hugo Thienpont, Mohammed Taghizadeh, Peter Van Daele

Research output: Contribution to journalArticlepeer-review

2 Citations (Scopus)


A qualitative comparison is made between laser direct writing and laser ablation as enabling technologies for the structuring of multimode waveguides (50×50µm2) and 45° micro-mirrors into an optical layer. A small demonstrator is fabricated that allows us to couple light vertically from a transmitter into an optical layer and from the optical layer to a receiver. The optical layer, a multifunctional acrylate-based photo-polymer, is applied on an FR4-substrate. Multimode waveguides, that carry signals in the plane of the optical layer, are fabricated by means of laser direct writing, a technology that is available at HWU. The 45° micro-mirrors, that provide out-of-plane coupling, are ablated with the laser ablation set-up available at UGent. This set-up contains a KrF-excimer laser (248nm) that can be tilted, which eases the definition of angled facets. Surface roughness measurements are performed on both the optical layer and the micro-mirrors with a non-contact optical profiler. Loss measurements are performed on both the waveguides and the micro-mirrors.

Original languageEnglish
Article number59561B
Pages (from-to)1-10
Number of pages10
JournalProceedings of SPIE - the International Society for Optical Engineering
Publication statusPublished - 2005
EventIntegrated Optics: Theory and Applications - Warsaw, Poland
Duration: 31 Aug 20052 Sep 2005


  • Coupling structures
  • Laser ablation
  • Laser direct writing
  • Optical interconnects
  • Optical waveguides


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