Large sensitive-area NbN nanowire superconducting single-photon detectors fabricated on single-crystal MgO substrates

Shigehito Miki, Mikio Fujiwara, Masahide Sasaki, Burm Baek, Aaron J. Miller, Robert H. Hadfield, Sae Woo Nam, Zhen Wang

Research output: Contribution to journalArticlepeer-review

114 Citations (Scopus)

Abstract

We report on the performance of large area NbN nanowire superconducting single-photon detectors (SSPDs). 20×20 µ m2 area SSPDs with 80 and 100 nm linewidths and 50% fill factor were fabricated in 4-nm -thick NbN films grown on single-crystal MgO substrates. The high quality of the devices was verified by electrical and optical testing and compares favorably to measurements of 10×10 µ m2 area SSPDs. Measurements of kinetic inductance versus bias current indicate that the constriction density is low. The fiber-coupled detection efficiency of the devices was 0.4%-3.5% at 100 Hz dark count rate. © 2008 American Institute of Physics.

Original languageEnglish
Article number061116
Pages (from-to)-
Number of pages3
JournalApplied Physics Letters
Volume92
Issue number6
DOIs
Publication statusPublished - 11 Feb 2008

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