TY - JOUR
T1 - Lamination based embossing technique for LTCC
AU - Wilhelm, Stefan Peter
AU - Kay, Robert W
AU - Mohammed, Mazher-Iqbal
AU - Lacrotte, Yves
AU - Desmulliez, Marc Phillipe Yves
PY - 2013/6/1
Y1 - 2013/6/1
N2 - This article describes a LTCC embossing technique performed during the isostatic lamination process. The technique allows for the reduction of manufacturing steps by patterning simultaneously the top and bottom faces of a green ceramic tape using structured metal sheets. The experiments detail the manufacture of raised and recessed patterns on the self constrained HL2000 ceramic system, including bump arrays, raised wall structures and recessed channels.
AB - This article describes a LTCC embossing technique performed during the isostatic lamination process. The technique allows for the reduction of manufacturing steps by patterning simultaneously the top and bottom faces of a green ceramic tape using structured metal sheets. The experiments detail the manufacture of raised and recessed patterns on the self constrained HL2000 ceramic system, including bump arrays, raised wall structures and recessed channels.
U2 - 10.1007/s00542-012-1702-y
DO - 10.1007/s00542-012-1702-y
M3 - Article
SN - 0946-7076
VL - 19
SP - 801
EP - 807
JO - Microsystem Technologies
JF - Microsystem Technologies
IS - 6
ER -