Ion sheath formation in radiofrequency inductive discharges

P. P. Vitruk; H. J. Baker; D. R. Hall

doi:10.1088/0022-3727/27/9/029

Ion sheath formation in radiofrequency inductive discharges

P. P. Vitruk
, H. J. Baker
, D. R. Hall

School of Engineering & Physical Sciences

Research output: Contribution to journal › Article › peer-review

Abstract

The direction of the electrostatic field previously described is revised. This correction does not, however, affect the conclusion concerning the ion sheath formation, which is caused by RF oscillations and not the DC drift of electrons.

Original language	English
Pages (from-to)	1994-
Journal	Journal of Physics D: Applied Physics
Volume	27
Issue number	9
DOIs	https://doi.org/10.1088/0022-3727/27/9/029
Publication status	Published - 1994

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title = "Ion sheath formation in radiofrequency inductive discharges",

abstract = "The direction of the electrostatic field previously described is revised. This correction does not, however, affect the conclusion concerning the ion sheath formation, which is caused by RF oscillations and not the DC drift of electrons.",

author = "Vitruk, \{P. P.\} and Baker, \{H. J.\} and Hall, \{D. R.\}",

year = "1994",

doi = "10.1088/0022-3727/27/9/029",

language = "English",

volume = "27",

pages = "1994--",

journal = "Journal of Physics D: Applied Physics",

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TY - JOUR

T1 - Ion sheath formation in radiofrequency inductive discharges

AU - Vitruk, P. P.

AU - Baker, H. J.

AU - Hall, D. R.

PY - 1994

Y1 - 1994

N2 - The direction of the electrostatic field previously described is revised. This correction does not, however, affect the conclusion concerning the ion sheath formation, which is caused by RF oscillations and not the DC drift of electrons.

AB - The direction of the electrostatic field previously described is revised. This correction does not, however, affect the conclusion concerning the ion sheath formation, which is caused by RF oscillations and not the DC drift of electrons.

U2 - 10.1088/0022-3727/27/9/029

DO - 10.1088/0022-3727/27/9/029

M3 - Article

SN - 0022-3727

VL - 27

SP - 1994-

JO - Journal of Physics D: Applied Physics

JF - Journal of Physics D: Applied Physics

IS - 9

ER -

Ion sheath formation in radiofrequency inductive discharges

Abstract

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