Abstract
The direction of the electrostatic field previously described is revised. This correction does not, however, affect the conclusion concerning the ion sheath formation, which is caused by RF oscillations and not the DC drift of electrons.
| Original language | English |
|---|---|
| Pages (from-to) | 1994- |
| Journal | Journal of Physics D: Applied Physics |
| Volume | 27 |
| Issue number | 9 |
| DOIs | |
| Publication status | Published - 1994 |
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Ion sheath formation in radiofrequency inductive discharges. / Vitruk, P. P.; Baker, H. J.; Hall, D. R.
In: Journal of Physics D: Applied Physics, Vol. 27, No. 9, 1994, p. 1994-.Research output: Contribution to journal › Article
TY - JOUR
T1 - Ion sheath formation in radiofrequency inductive discharges
AU - Vitruk, P. P.
AU - Baker, H. J.
AU - Hall, D. R.
PY - 1994
Y1 - 1994
N2 - The direction of the electrostatic field previously described is revised. This correction does not, however, affect the conclusion concerning the ion sheath formation, which is caused by RF oscillations and not the DC drift of electrons.
AB - The direction of the electrostatic field previously described is revised. This correction does not, however, affect the conclusion concerning the ion sheath formation, which is caused by RF oscillations and not the DC drift of electrons.
U2 - 10.1088/0022-3727/27/9/029
DO - 10.1088/0022-3727/27/9/029
M3 - Article
VL - 27
SP - 1994-
JO - Journal of Physics D: Applied Physics
JF - Journal of Physics D: Applied Physics
SN - 0022-3727
IS - 9
ER -