Ion sheath formation in radiofrequency inductive discharges

P. P. Vitruk, H. J. Baker, D. R. Hall

Research output: Contribution to journalArticle

Abstract

The direction of the electrostatic field previously described is revised. This correction does not, however, affect the conclusion concerning the ion sheath formation, which is caused by RF oscillations and not the DC drift of electrons.

Original languageEnglish
Pages (from-to)1994-
JournalJournal of Physics D: Applied Physics
Volume27
Issue number9
DOIs
Publication statusPublished - 1994

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ion sheaths
direct current
oscillations
electric fields
electrons

Cite this

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title = "Ion sheath formation in radiofrequency inductive discharges",
abstract = "The direction of the electrostatic field previously described is revised. This correction does not, however, affect the conclusion concerning the ion sheath formation, which is caused by RF oscillations and not the DC drift of electrons.",
author = "Vitruk, {P. P.} and Baker, {H. J.} and Hall, {D. R.}",
year = "1994",
doi = "10.1088/0022-3727/27/9/029",
language = "English",
volume = "27",
pages = "1994--",
journal = "Journal of Physics D: Applied Physics",
issn = "0022-3727",
publisher = "IOP Publishing",
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}

Ion sheath formation in radiofrequency inductive discharges. / Vitruk, P. P.; Baker, H. J.; Hall, D. R.

In: Journal of Physics D: Applied Physics, Vol. 27, No. 9, 1994, p. 1994-.

Research output: Contribution to journalArticle

TY - JOUR

T1 - Ion sheath formation in radiofrequency inductive discharges

AU - Vitruk, P. P.

AU - Baker, H. J.

AU - Hall, D. R.

PY - 1994

Y1 - 1994

N2 - The direction of the electrostatic field previously described is revised. This correction does not, however, affect the conclusion concerning the ion sheath formation, which is caused by RF oscillations and not the DC drift of electrons.

AB - The direction of the electrostatic field previously described is revised. This correction does not, however, affect the conclusion concerning the ion sheath formation, which is caused by RF oscillations and not the DC drift of electrons.

U2 - 10.1088/0022-3727/27/9/029

DO - 10.1088/0022-3727/27/9/029

M3 - Article

VL - 27

SP - 1994-

JO - Journal of Physics D: Applied Physics

JF - Journal of Physics D: Applied Physics

SN - 0022-3727

IS - 9

ER -