Ion sheath formation in radiofrequency inductive discharges

P. P. Vitruk, H. J. Baker, D. R. Hall

Research output: Contribution to journalArticle

Abstract

The direction of the electrostatic field previously described is revised. This correction does not, however, affect the conclusion concerning the ion sheath formation, which is caused by RF oscillations and not the DC drift of electrons.

Original languageEnglish
Pages (from-to)1994-
JournalJournal of Physics D: Applied Physics
Volume27
Issue number9
DOIs
Publication statusPublished - 1994

Fingerprint Dive into the research topics of 'Ion sheath formation in radiofrequency inductive discharges'. Together they form a unique fingerprint.

  • Cite this