Abstract
We describe a simulation to model the two-photon optical beam induced current effect in silicon integrated circuits. Our model includes explicitly both the single-photon and two-photon absorption coefficients and explains how it is possible to obtain a three-dimensional image using this technique despite the relatively weak focal dependence. A full comparison with experimental results is also included. © 2003 Published by Elsevier Science B.V.
Original language | English |
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Pages (from-to) | 427-433 |
Number of pages | 7 |
Journal | Optics Communications |
Volume | 221 |
Issue number | 4-6 |
DOIs | |
Publication status | Published - 15 Jun 2003 |