Investigation of the two-photon optical beam induced current effect in silicon integrated circuits

E. Ramsay, D. T. Reid

Research output: Contribution to journalArticlepeer-review

10 Citations (Scopus)

Abstract

We describe a simulation to model the two-photon optical beam induced current effect in silicon integrated circuits. Our model includes explicitly both the single-photon and two-photon absorption coefficients and explains how it is possible to obtain a three-dimensional image using this technique despite the relatively weak focal dependence. A full comparison with experimental results is also included. © 2003 Published by Elsevier Science B.V.

Original languageEnglish
Pages (from-to)427-433
Number of pages7
JournalOptics Communications
Volume221
Issue number4-6
DOIs
Publication statusPublished - 15 Jun 2003

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