Introduction to design and fabrication of diffractive optical elements

Research output: Contribution to journal › Article › peer-review

Original language	English
Pages (from-to)	219-242
Number of pages	24
Journal	Microelectronic Engineering
Volume	34
DOIs	https://doi.org/10.1016/S0167-9317(97)00188-3
Publication status	Published - 1997

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@article{07e88f636a6d4c88ad7760b3bc6fce4f,

title = "Introduction to design and fabrication of diffractive optical elements",

author = "Taghizadeh, \{Mohammad Reza\} and P Blair and Barton, \{I M\} and B Layet and A Waddie",

year = "1997",

doi = "10.1016/S0167-9317(97)00188-3",

language = "English",

volume = "34",

pages = "219--242",

journal = "Microelectronic Engineering",

issn = "0167-9317",

publisher = "Elsevier B.V.",

}

TY - JOUR

T1 - Introduction to design and fabrication of diffractive optical elements

AU - Taghizadeh, Mohammad Reza

AU - Blair, P

AU - Barton, I M

AU - Layet, B

AU - Waddie, A

PY - 1997

Y1 - 1997

U2 - 10.1016/S0167-9317(97)00188-3

DO - 10.1016/S0167-9317(97)00188-3

M3 - Article

SN - 0167-9317

VL - 34

SP - 219

EP - 242

JO - Microelectronic Engineering

JF - Microelectronic Engineering

ER -