Introduction to design and fabrication of diffractive optical elements

Mohammad Reza Taghizadeh, P Blair, I M Barton, B Layet, A Waddie

Research output: Contribution to journalArticle

Original languageEnglish
Pages (from-to)219-242
Number of pages24
JournalMicroelectronic Engineering
Volume34
DOIs
Publication statusPublished - 1997

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