Integration of IC technology with MEMS: silicon+ technology for the future

A J Walton, J T M Stevenson, I Underwood, J Terry, S Smith, W Parkes, C Dunare, H Lin, Y Li, R Henderson, D Renshaw, K Muir, Marc Phillipe Yves Desmulliez, David Flynn, M J MacIntosh, W S Holland, A F Murray, T B Tang, A Bunting, A M Gundlach

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Original languageEnglish
Title of host publication2007 IET Seminar on Micro Electro-Mechanical Systems
PublisherInstitution of Engineering and Technology
Number of pages11
ISBN (Print)9780863418075, 9781605600307
Publication statusPublished - 2007
Event2007 IET Seminar on Micro Electro-Mechanical Systems - London, United Kingdom
Duration: 25 Apr 200725 Apr 2007

Conference

Conference2007 IET Seminar on Micro Electro-Mechanical Systems
CountryUnited Kingdom
CityLondon
Period25/04/0725/04/07

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