Walton, AJ, Stevenson, JTM, Underwood, I, Terry, J, Smith, S, Parkes, W, Dunare, C, Lin, H, Li, Y, Henderson, R, Renshaw, D, Muir, K
, Desmulliez, MPY, Flynn, D, MacIntosh, MJ, Holland, WS, Murray, AF, Tang, TB, Bunting, A & Gundlach, AM 2007,
Integration of IC technology with MEMS: silicon+ technology for the future. in
2007 IET Seminar on Micro Electro-Mechanical Systems. Institution of Engineering and Technology, 2007 IET Seminar on Micro Electro-Mechanical Systems, London, United Kingdom,
25/04/07.