Integration of Electrodeposited Ni-Fe in MEMS with Low-Temperature Deposition and Etch Processes

Giuseppe Schiavone, Jeremy Murray, Richard Perry, Andrew R. Mount, Marc Phillipe Yves Desmulliez, Anthony J. Walton

Research output: Contribution to journalArticlepeer-review

5 Citations (Scopus)
15 Downloads (Pure)

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Engineering & Materials Science

Chemical Compounds