Integrated sensors for health monitoring in advanced electronic systems

C. H. Wang, Y. Liu, M. Desmulliez, A. Richardson

Research output: Chapter in Book/Report/Conference proceedingConference contribution

4 Citations (Scopus)


This paper presents the development of integrated sensors for health monitoring applications in microsystems. Intelligent health monitoring is an emerging method for early diagnostic of the status or "health" of electronic systems and products under operation based on embedded tests. In this approach miniature sensors are used to monitor the key parameters of the package/system for example temperature, pressure, stress and humidity. Based on the outputs of the sensors stimuli are then used to test the responses of the system to determine its behavior. Thus early warning of system fault or failure can be obtained and measures taken for repair work or replacement of the system. We have been developing integrated sensors on a chip for heath monitoring applications in electronic systems. Integrated sensors on LiNbO3 and silicon substrates are being investigated. In this paper we report the development of discrete sensors and the integration methods. Thin film temperature sensor arrays have been developed and tested as embedded sensors in substrate assemblies. SAW based low cost sensors have been designed and fabricated for humidity monitoring. Methods for sensor integration and the preliminary results are described. ©2009 IEEE.

Original languageEnglish
Title of host publication2009 4th International Design and Test Workshop, IDT 2009
Publication statusPublished - 2009
Event2009 4th International Design and Test Workshop - Riyadh, Saudi Arabia
Duration: 15 Nov 200917 Nov 2009


Conference2009 4th International Design and Test Workshop
Abbreviated titleIDT 2009
Country/TerritorySaudi Arabia


  • Health monitoring
  • Integrated sensors
  • MEMS
  • System in Package (SiP)


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