Integrated Magnetic MEMS Relays: Status of the Technology

Giuseppe Schiavone, Marc P. Y. Desmulliez, Anthony J. Walton

Research output: Contribution to journalLiterature review

14 Citations (Scopus)
92 Downloads (Pure)

Abstract

The development and application of magnetic technologies employing microfabricated magnetic structures for the production of switching components has generated enormous interest in the scientific and industrial communities over the last decade. Magnetic actuation offers many benefits when compared to other schemes for microelectromechanical systems (MEMS), including the generation of forces that have higher magnitude and longer range. Magnetic actuation can be achieved using different excitation sources, which create challenges related to the integration with other technologies, such as CMOS (Complementary Metal Oxide Semiconductor), and the requirement to reduce power consumption. Novel designs and technologies are therefore sought to enable the use of magnetic switching architectures in integrated MEMS devices, without incurring excessive energy consumption. This article reviews the status of magnetic MEMS technology and presents devices recently developed by various research groups, with key focuses on integrability and effective power management, in addition to the ability to integrate the technology with other microelectronic fabrication processes.

Original languageEnglish
Pages (from-to)622-653
Number of pages32
JournalMicromachines
Volume5
Issue number3
DOIs
Publication statusPublished - Sep 2014

Keywords

  • magnetic MEMS (microelectromechanical systems)
  • relays
  • MEMS integration
  • MEMS switches
  • microactuators
  • RF-MEMS (radio frequency MEMS)
  • MICROELECTROMECHANICAL SYSTEMS MEMS
  • RF-MEMS
  • LOW-VOLTAGE
  • THIN-FILMS
  • CONTACT MATERIALS
  • SWITCHES
  • RELIABILITY
  • DESIGN
  • PERFORMANCE
  • FABRICATION

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