Influence of nanoparticle coolant and crystal structure of the workpiece during nanometric cutting of silicon carbide

Saurav Goel, Xichun Luo, Alexander Stukowski, Robert L. Reuben

Research output: Chapter in Book/Report/Conference proceedingConference contribution

3 Citations (Scopus)

Abstract

Silicon carbide (SiC) is a suitable candidate for MEMS, NEMS, optoelectronic and nanotribological applications e.g. airborne laser devices, laser radar systems, vacuum ultraviolet (VUV) telescopes and space based laser mirrors. In-depth understanding of the influence of coolant and crystal structure of the work material on the nanometric cutting process of SiC could help in cost saving operations. Therefore, nanoscratching trials were carried out on single crystal 6H-SiC involving four pre-selected coolants to emulate nanometric cutting. A specific coolant was found to improve the cutting conditions tremendously and hence recommended. Moreover, a molecular dynamics (MD) simulation model was developed to simulate nanometric cutting of polycrystalline (PC) 3C-SiC and single crystal (SC) 3C-SiC. Besides explaining the reasons for the ease of machinability of chemically vapour deposited (CVD) 3C-SiC compared to SC-3C-SiC, simulation results also explains why SC-SiC provides a better measure of attainable surface roughness in comparison to CVD-SiC and reaction bonded (RB)-SiC.

Original languageEnglish
Title of host publicationProceedings of the 12th International Conference of the European Society for Precision Engineering and Nanotechnology
PublisherEuspen
Pages299-302
Number of pages4
ISBN (Electronic)9780956679000
Publication statusPublished - 2012
Event12th International Conference of the European Society for Precision Engineering and Nanotechnology 2012 - Stockholm, Sweden
Duration: 4 Jun 20127 Jun 2012

Conference

Conference12th International Conference of the European Society for Precision Engineering and Nanotechnology 2012
Abbreviated titleEUSPEN 2012
CountrySweden
CityStockholm
Period4/06/127/06/12

ASJC Scopus subject areas

  • Industrial and Manufacturing Engineering
  • Mechanical Engineering
  • Instrumentation
  • Environmental Engineering
  • Materials Science(all)

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  • Cite this

    Goel, S., Luo, X., Stukowski, A., & Reuben, R. L. (2012). Influence of nanoparticle coolant and crystal structure of the workpiece during nanometric cutting of silicon carbide. In Proceedings of the 12th International Conference of the European Society for Precision Engineering and Nanotechnology (pp. 299-302). Euspen.