In-situ test structures for ultra low leak detection

Suzanne Millar; M. P Y Desmulliez; Scott Cargill; Stewart McCracken

doi:10.1109/ESTC.2010.5642875

In-situ test structures for ultra low leak detection

Suzanne Millar, M. P Y Desmulliez, Scott Cargill, Stewart McCracken

School of Engineering & Physical Sciences

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

4 Citations (Scopus)

Abstract

New leak detection strategies are required for MEMS packages as traditional methods are not suited due to the small size of the cavities involved. This paper presents the design, fabrication and calibration procedure for three in-situ test structures intended to monitor electrically the hermeticity of packages. The calibration results of a micro-Pirani test structure show that this test structure can be used to monitor the ambient pressure of vacuum packaged MEMS. Using a pressured tracer gas to accelerate the test, the micro-Pirani test structure can detect leak rates down to 10^-15 atm.cm³.s^-1.

Original language	English
Title of host publication	Electronics System Integration Technology Conference, ESTC 2010 - Proceedings
DOIs	https://doi.org/10.1109/ESTC.2010.5642875
Publication status	Published - 2010
Event	3rd Electronics System Integration Technology Conference - Berlin, Germany Duration: 13 Sept 2010 → 16 Sept 2010

Conference

Conference	3rd Electronics System Integration Technology Conference
Abbreviated title	ESTC 2010
Country/Territory	Germany
City	Berlin
Period	13/09/10 → 16/09/10

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10.1109/ESTC.2010.5642875

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title = "In-situ test structures for ultra low leak detection",

abstract = "New leak detection strategies are required for MEMS packages as traditional methods are not suited due to the small size of the cavities involved. This paper presents the design, fabrication and calibration procedure for three in-situ test structures intended to monitor electrically the hermeticity of packages. The calibration results of a micro-Pirani test structure show that this test structure can be used to monitor the ambient pressure of vacuum packaged MEMS. Using a pressured tracer gas to accelerate the test, the micro-Pirani test structure can detect leak rates down to 10-15 atm.cm3.s-1.",

author = "Suzanne Millar and Desmulliez, {M. P Y} and Scott Cargill and Stewart McCracken",

year = "2010",

doi = "10.1109/ESTC.2010.5642875",

language = "English",

isbn = "9781424485536",

booktitle = "Electronics System Integration Technology Conference, ESTC 2010 - Proceedings",

note = "3rd Electronics System Integration Technology Conference, ESTC 2010 ; Conference date: 13-09-2010 Through 16-09-2010",

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T1 - In-situ test structures for ultra low leak detection

AU - Millar, Suzanne

AU - Desmulliez, M. P Y

AU - Cargill, Scott

AU - McCracken, Stewart

PY - 2010

Y1 - 2010

N2 - New leak detection strategies are required for MEMS packages as traditional methods are not suited due to the small size of the cavities involved. This paper presents the design, fabrication and calibration procedure for three in-situ test structures intended to monitor electrically the hermeticity of packages. The calibration results of a micro-Pirani test structure show that this test structure can be used to monitor the ambient pressure of vacuum packaged MEMS. Using a pressured tracer gas to accelerate the test, the micro-Pirani test structure can detect leak rates down to 10-15 atm.cm3.s-1.

AB - New leak detection strategies are required for MEMS packages as traditional methods are not suited due to the small size of the cavities involved. This paper presents the design, fabrication and calibration procedure for three in-situ test structures intended to monitor electrically the hermeticity of packages. The calibration results of a micro-Pirani test structure show that this test structure can be used to monitor the ambient pressure of vacuum packaged MEMS. Using a pressured tracer gas to accelerate the test, the micro-Pirani test structure can detect leak rates down to 10-15 atm.cm3.s-1.

UR - http://www.scopus.com/inward/record.url?scp=78651285700&partnerID=8YFLogxK

U2 - 10.1109/ESTC.2010.5642875

DO - 10.1109/ESTC.2010.5642875

M3 - Conference contribution

SN - 9781424485536

BT - Electronics System Integration Technology Conference, ESTC 2010 - Proceedings

T2 - 3rd Electronics System Integration Technology Conference

Y2 - 13 September 2010 through 16 September 2010

ER -

In-situ test structures for ultra low leak detection

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Conference

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