Smart actuators are the key components in a variety of nanopositioning applications, such as scanning probe microscopes and atomic force microscopes. Piezoelectric actuators are the most common smart actuators due to their high resolution, low power consumption, and wide operating frequency but they suffer hysteresis which affects linearity. In this paper, an innovative digital charge amplifier is presented to reduce hysteresis in piezoelectric stack actuators. Compared to traditional analog charge drives, experimental results show that the piezoelectric stack actuator driven by the digital charge amplifier has less hysteresis. It is also shown that the voltage drop of the digital charge amplifier is significantly less than the voltage drop of conventional analog charge amplifiers.
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