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Impact of multiple sub-melt laser scans on the activation and diffusion of shallow Boron junctions
E. Rosseel, W. Vandervorst, T. Clarysse, J. Goossens, A. Moussa, R. Lin, Dirch H. Petersen, P. F. Nielsen, Ole Hansen, Nick Bennett, Nick E. B. Cowern
Research output: Chapter in Book/Report/Conference proceeding › Conference contribution
5
Citations
(Scopus)