In this paper, work is described on the fabrication of highly uniform 8 × 8 arrays of GaAs-AlGaAs vertical-cavity surface-emitting lasers (VCSEL's). Oxide-confined VCSEL arrays show an average threshold current of 0.74±0.02 mA, an average output power of 2.05±0.03 mW at 8 mA and an average power conversion efficiency of 14.3%. Their wavelength is measured to be 967±0.35 nm over the array. In addition, we describe the alignment and integration of these device arrays with arrays of refractive microlenses to allow beam shaping typically required in system applications.
|Number of pages||3|
|Journal||IEEE Photonics Technology Letters|
|Publication status||Published - May 2000|
- Microlens arrays
- Optical interconnections
- Vertical-cavity surface-emitting lasers