Highly Uniform Vertical-Cavity Surface-Emitting Lasers Integrated with Microlens Arrays

S. Eitel, S. J. Fancey, H. P. Gauggel, K. H. Gulden, W. Bächtold, M. R. Taghizadeh

Research output: Contribution to journalArticlepeer-review

66 Citations (Scopus)


In this paper, work is described on the fabrication of highly uniform 8 × 8 arrays of GaAs-AlGaAs vertical-cavity surface-emitting lasers (VCSEL's). Oxide-confined VCSEL arrays show an average threshold current of 0.74±0.02 mA, an average output power of 2.05±0.03 mW at 8 mA and an average power conversion efficiency of 14.3%. Their wavelength is measured to be 967±0.35 nm over the array. In addition, we describe the alignment and integration of these device arrays with arrays of refractive microlenses to allow beam shaping typically required in system applications.

Original languageEnglish
Pages (from-to)459-461
Number of pages3
JournalIEEE Photonics Technology Letters
Issue number5
Publication statusPublished - May 2000


  • Microlens arrays
  • Optical interconnections
  • Vertical-cavity surface-emitting lasers


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