Highly sensitive and flexible pressure sensors using position- and dimension-controlled ZnO nanotube arrays grown on graphene films

Jun Beom Park, Minho S. Song, Ramesh Ghosh, Rajendra Kumar Saroj, Yunjae Hwang, Youngbin Tchoe, Hongseok Oh, Hyeonjun Baek, Yoonseo Lim, Bosung Kim, Sang Woo Kim, Gyu Chul Yi

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Abstract

A facile and novel technique for the fabrication of pressure sensors is reported based on the hybridization of one-dimensional nanomaterials and two-dimensional graphene film. In particular, piezoelectric pressure sensors are fabricated by using vertically aligned and position- and dimension-controlled ZnO nanotube arrays grown on graphene layers. Graphene layers act not only as substrates for catalyst-free growth of high-quality ZnO nanotubes but also as flexible conduction channels connecting ZnO nanotubes and metal electrodes. Freestanding and flexible sensors have been efficiently obtained via mechanical lift-off of hybrid ZnO nanotube/graphene film structures and by exploiting the weak van der Waals forces existing between the graphene film and the original substrates. A prototype of such devices shows a high pressure sensitivity (−4.4 kPa−1), which would enable the detection of weak flows of inert gas. The relatively low wall thickness and large length of the ZnO nanotubes suggest a relatively high sensitivity to external pressures. The obtained nanotube sensors are attached to the philtrum and wrist of a volunteer and used to monitor his breath and heart rate. Overall, the prototype hybrid sensing device has great potential as wearable technology, especially in the sector of advanced healthcare devices.

Original languageEnglish
Article number57
JournalNPG Asia Materials
Volume13
DOIs
Publication statusPublished - 30 Jul 2021

ASJC Scopus subject areas

  • Modelling and Simulation
  • Materials Science(all)
  • Condensed Matter Physics

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