High throughput diffractive multi-beam femtosecond laser processing using a spatial light modulator

Zheng Kuang; Walter Perrie; Jonathan Leach; Martin Sharp; Stuart P. Edwardson; Miles Padgett; Geoff Dearden; Ken G. Watkins

doi:10.1016/j.apsusc.2008.07.091

High throughput diffractive multi-beam femtosecond laser processing using a spatial light modulator

Zheng Kuang, Walter Perrie, Jonathan Leach, Martin Sharp, Stuart P. Edwardson, Miles Padgett, Geoff Dearden, Ken G. Watkins

Research output: Contribution to journal › Article › peer-review

132 Citations (Scopus)

Abstract

High throughput femtosecond laser processing is demonstrated by creating multiple beams using a spatial light modulator (SLM). The diffractive multi-beam patterns are modulated in real time by computer generated holograms (CGHs), which can be calculated by appropriate algorithms. An interactive LabVIEW program is adopted to generate the relevant CGHs. Optical efficiency at this stage is shown to be similar to 50% into first order beams and real time processing has been carried out at 50 Hz refresh rate. Results obtained demonstrate high precision surface micro-structuring on silicon and Ti6Al4V with throughput gain >1 order of magnitude. (C) 2008 Elsevier B. V. All rights reserved.

Original language	English
Pages (from-to)	2284-2289
Number of pages	6
Journal	Applied Surface Science
Volume	255
Issue number	5
DOIs	https://doi.org/10.1016/j.apsusc.2008.07.091
Publication status	Published - 30 Dec 2008

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title = "High throughput diffractive multi-beam femtosecond laser processing using a spatial light modulator",

abstract = "High throughput femtosecond laser processing is demonstrated by creating multiple beams using a spatial light modulator (SLM). The diffractive multi-beam patterns are modulated in real time by computer generated holograms (CGHs), which can be calculated by appropriate algorithms. An interactive LabVIEW program is adopted to generate the relevant CGHs. Optical efficiency at this stage is shown to be similar to 50% into first order beams and real time processing has been carried out at 50 Hz refresh rate. Results obtained demonstrate high precision surface micro-structuring on silicon and Ti6Al4V with throughput gain >1 order of magnitude. (C) 2008 Elsevier B. V. All rights reserved.",

author = "Zheng Kuang and Walter Perrie and Jonathan Leach and Martin Sharp and Edwardson, {Stuart P.} and Miles Padgett and Geoff Dearden and Watkins, {Ken G.}",

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T1 - High throughput diffractive multi-beam femtosecond laser processing using a spatial light modulator

AU - Kuang, Zheng

AU - Perrie, Walter

AU - Leach, Jonathan

AU - Sharp, Martin

AU - Edwardson, Stuart P.

AU - Padgett, Miles

AU - Dearden, Geoff

AU - Watkins, Ken G.

PY - 2008/12/30

Y1 - 2008/12/30

N2 - High throughput femtosecond laser processing is demonstrated by creating multiple beams using a spatial light modulator (SLM). The diffractive multi-beam patterns are modulated in real time by computer generated holograms (CGHs), which can be calculated by appropriate algorithms. An interactive LabVIEW program is adopted to generate the relevant CGHs. Optical efficiency at this stage is shown to be similar to 50% into first order beams and real time processing has been carried out at 50 Hz refresh rate. Results obtained demonstrate high precision surface micro-structuring on silicon and Ti6Al4V with throughput gain >1 order of magnitude. (C) 2008 Elsevier B. V. All rights reserved.

AB - High throughput femtosecond laser processing is demonstrated by creating multiple beams using a spatial light modulator (SLM). The diffractive multi-beam patterns are modulated in real time by computer generated holograms (CGHs), which can be calculated by appropriate algorithms. An interactive LabVIEW program is adopted to generate the relevant CGHs. Optical efficiency at this stage is shown to be similar to 50% into first order beams and real time processing has been carried out at 50 Hz refresh rate. Results obtained demonstrate high precision surface micro-structuring on silicon and Ti6Al4V with throughput gain >1 order of magnitude. (C) 2008 Elsevier B. V. All rights reserved.

U2 - 10.1016/j.apsusc.2008.07.091

DO - 10.1016/j.apsusc.2008.07.091

M3 - Article

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VL - 255

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EP - 2289

JO - Applied Surface Science

JF - Applied Surface Science

IS - 5

ER -

High throughput diffractive multi-beam femtosecond laser processing using a spatial light modulator

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