| Original language | English |
|---|---|
| Pages (from-to) | 930-932 |
| Number of pages | 3 |
| Journal | Electronics Letters |
| Volume | 25 |
| Issue number | 14 |
| Publication status | Published - 6 Jul 1989 |
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High spatial resolution photo-oxidation of a-Si: C:H films at low temperatures
- P. John
- , A. Qayyum
- , J. I B Wilson
Research output: Contribution to journal › Article › peer-review
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