Original language | English |
---|---|
Pages (from-to) | 930-932 |
Number of pages | 3 |
Journal | Electronics Letters |
Volume | 25 |
Issue number | 14 |
Publication status | Published - 6 Jul 1989 |
High spatial resolution photo-oxidation of a-Si: C:H films at low temperatures
P. John, A. Qayyum, J. I B Wilson
Research output: Contribution to journal › Article › peer-review