High spatial resolution photo-oxidation of a-Si: C:H films at low temperatures

P. John, A. Qayyum, J. I B Wilson

Research output: Contribution to journal › Article › peer-review

Cite this

@article{b681e9cea0784d7fa7bd8b0b8b306d26,

title = "High spatial resolution photo-oxidation of a-Si: C:H films at low temperatures",

author = "P. John and A. Qayyum and Wilson, {J. I B}",

year = "1989",

month = jul,

day = "6",

language = "English",

volume = "25",

pages = "930--932",

journal = "Electronics Letters",

issn = "1350-911X",

publisher = "Institution of Engineering and Technology",

number = "14",

}