High spatial resolution photo-oxidation of a-Si: C:H films at low temperatures

P. John, A. Qayyum, J. I B Wilson

Research output: Contribution to journalArticlepeer-review

Original languageEnglish
Pages (from-to)930-932
Number of pages3
JournalElectronics Letters
Volume25
Issue number14
Publication statusPublished - 6 Jul 1989

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