High-resolution subsurface microscopy of CMOS integrated circuits using radially polarized light

Marius Rutkauskas, Carl Farrell, C. Dorrer, K. L. Marshall, Theodore R Lundquist, Praveen Vedagarbha, Derryck Telford Reid

Research output: Contribution to journalArticlepeer-review

8 Citations (Scopus)

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Medicine & Life Sciences