High repetition rate microsecond pulse generation for material processing using a planar waveguide CO2 MOPA system

Q. Cao, H. J. Baker, D. R. Hall

Research output: Contribution to conferencePaper

Abstract

The radio frequency excited planar waveguide technology is developed to produce sealed-off static gas sources for the intermediate processing window. The developed system is suited for investigating the pulse width dependence of micro-machining and metal and dielectric material ablation.

Original languageEnglish
Pages208-
Publication statusPublished - 2000
Event2000 International Quantum Electronics Conference - Nice, France
Duration: 10 Sep 200015 Sep 2000

Conference

Conference2000 International Quantum Electronics Conference
Abbreviated titleIQEC 2000
CountryFrance
CityNice
Period10/09/0015/09/00

Fingerprint

pulse repetition rate
machining
ablation
radio frequencies
pulse duration
waveguides
gases
metals

Cite this

Cao, Q., Baker, H. J., & Hall, D. R. (2000). High repetition rate microsecond pulse generation for material processing using a planar waveguide CO2 MOPA system. 208-. Paper presented at 2000 International Quantum Electronics Conference, Nice, France.
Cao, Q. ; Baker, H. J. ; Hall, D. R. / High repetition rate microsecond pulse generation for material processing using a planar waveguide CO2 MOPA system. Paper presented at 2000 International Quantum Electronics Conference, Nice, France.
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abstract = "The radio frequency excited planar waveguide technology is developed to produce sealed-off static gas sources for the intermediate processing window. The developed system is suited for investigating the pulse width dependence of micro-machining and metal and dielectric material ablation.",
author = "Q. Cao and Baker, {H. J.} and Hall, {D. R.}",
year = "2000",
language = "English",
pages = "208--",
note = "2000 International Quantum Electronics Conference, IQEC 2000 ; Conference date: 10-09-2000 Through 15-09-2000",

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Cao, Q, Baker, HJ & Hall, DR 2000, 'High repetition rate microsecond pulse generation for material processing using a planar waveguide CO2 MOPA system' Paper presented at 2000 International Quantum Electronics Conference, Nice, France, 10/09/00 - 15/09/00, pp. 208-.

High repetition rate microsecond pulse generation for material processing using a planar waveguide CO2 MOPA system. / Cao, Q.; Baker, H. J.; Hall, D. R.

2000. 208- Paper presented at 2000 International Quantum Electronics Conference, Nice, France.

Research output: Contribution to conferencePaper

TY - CONF

T1 - High repetition rate microsecond pulse generation for material processing using a planar waveguide CO2 MOPA system

AU - Cao, Q.

AU - Baker, H. J.

AU - Hall, D. R.

PY - 2000

Y1 - 2000

N2 - The radio frequency excited planar waveguide technology is developed to produce sealed-off static gas sources for the intermediate processing window. The developed system is suited for investigating the pulse width dependence of micro-machining and metal and dielectric material ablation.

AB - The radio frequency excited planar waveguide technology is developed to produce sealed-off static gas sources for the intermediate processing window. The developed system is suited for investigating the pulse width dependence of micro-machining and metal and dielectric material ablation.

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M3 - Paper

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ER -

Cao Q, Baker HJ, Hall DR. High repetition rate microsecond pulse generation for material processing using a planar waveguide CO2 MOPA system. 2000. Paper presented at 2000 International Quantum Electronics Conference, Nice, France.