The radio frequency excited planar waveguide technology is developed to produce sealed-off static gas sources for the intermediate processing window. The developed system is suited for investigating the pulse width dependence of micro-machining and metal and dielectric material ablation.
|Publication status||Published - 2000|
|Event||2000 International Quantum Electronics Conference - Nice, France|
Duration: 10 Sept 2000 → 15 Sept 2000
|Conference||2000 International Quantum Electronics Conference|
|Abbreviated title||IQEC 2000|
|Period||10/09/00 → 15/09/00|