High repetition rate microsecond pulse generation for material processing using a planar waveguide CO2 MOPA system

Q. Cao, H. J. Baker, D. R. Hall

Research output: Contribution to conferencePaper

Abstract

The radio frequency excited planar waveguide technology is developed to produce sealed-off static gas sources for the intermediate processing window. The developed system is suited for investigating the pulse width dependence of micro-machining and metal and dielectric material ablation.

Original languageEnglish
Pages208-
Publication statusPublished - 2000
Event2000 International Quantum Electronics Conference - Nice, France
Duration: 10 Sep 200015 Sep 2000

Conference

Conference2000 International Quantum Electronics Conference
Abbreviated titleIQEC 2000
CountryFrance
CityNice
Period10/09/0015/09/00

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  • Cite this

    Cao, Q., Baker, H. J., & Hall, D. R. (2000). High repetition rate microsecond pulse generation for material processing using a planar waveguide CO2 MOPA system. 208-. Paper presented at 2000 International Quantum Electronics Conference, Nice, France.