High repetition rate microsecond pulse generation for material processing using a planar waveguide CO2 MOPA system

Q. Cao; H. J. Baker; D. R. Hall

High repetition rate microsecond pulse generation for material processing using a planar waveguide CO₂ MOPA system

Q. Cao, H. J. Baker, D. R. Hall

School of Engineering & Physical Sciences

Research output: Contribution to conference › Paper › peer-review

Abstract

The radio frequency excited planar waveguide technology is developed to produce sealed-off static gas sources for the intermediate processing window. The developed system is suited for investigating the pulse width dependence of micro-machining and metal and dielectric material ablation.

Original language	English
Pages	208-
Publication status	Published - 2000
Event	2000 International Quantum Electronics Conference - Nice, France Duration: 10 Sept 2000 → 15 Sept 2000

Conference

Conference	2000 International Quantum Electronics Conference
Abbreviated title	IQEC 2000
Country/Territory	France
City	Nice
Period	10/09/00 → 15/09/00

Cite this

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title = "High repetition rate microsecond pulse generation for material processing using a planar waveguide CO2 MOPA system",

abstract = "The radio frequency excited planar waveguide technology is developed to produce sealed-off static gas sources for the intermediate processing window. The developed system is suited for investigating the pulse width dependence of micro-machining and metal and dielectric material ablation.",

author = "Q. Cao and Baker, {H. J.} and Hall, {D. R.}",

year = "2000",

language = "English",

pages = "208--",

note = "2000 International Quantum Electronics Conference, IQEC 2000 ; Conference date: 10-09-2000 Through 15-09-2000",

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TY - CONF

T1 - High repetition rate microsecond pulse generation for material processing using a planar waveguide CO2 MOPA system

AU - Cao, Q.

AU - Baker, H. J.

AU - Hall, D. R.

PY - 2000

Y1 - 2000

N2 - The radio frequency excited planar waveguide technology is developed to produce sealed-off static gas sources for the intermediate processing window. The developed system is suited for investigating the pulse width dependence of micro-machining and metal and dielectric material ablation.

AB - The radio frequency excited planar waveguide technology is developed to produce sealed-off static gas sources for the intermediate processing window. The developed system is suited for investigating the pulse width dependence of micro-machining and metal and dielectric material ablation.

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M3 - Paper

SP - 208-

T2 - 2000 International Quantum Electronics Conference

Y2 - 10 September 2000 through 15 September 2000

ER -

High repetition rate microsecond pulse generation for material processing using a planar waveguide CO₂ MOPA system

Abstract

Conference

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