Growth rate and morphology for ceramic films by pulsed-MOCVD

Susan Krumdieck*, Rishi Raj

*Corresponding author for this work

Research output: Contribution to journalArticlepeer-review

35 Citations (Scopus)


Titania films were deposited on nickel substrates from a dilute solution of titanium isopropoxide (TTIP) in toluene in order to study the growth rate and degree of microstructure control attainable with a metalorganic chemical vapor deposition system called pulsed-MOCVD. This novel system employs pulsed liquid injection with ultrasonic atomization to deliver the precursor to the low-pressure reactor. The film growth rate was studied as a function of temperature and precursor injection rate. An Arrhenius behavior was evident for susceptor temperatures below 500°C. At higher temperatures, the growth rate was nearly equal to the injection rate. Films 45 ±0.1-μm thick were deposited at rates of up to 0.5 ±0.008 μm/min. Two methods were employed for measurement of film growth rate, direct in situ observation of color-fringe evolution and calculation from final film thickness measurements using an optical microscope. The influence of deposition parameters on morphology was studied. The microstructure was characterized using optical and scanning electron microscopy (SEM) and X-ray diffraction (XRD). At temperatures below 500°C the film was dense with small equiaxed crystals. At higher temperatures films were textured and columnar. With the combination of high injection rate and high temperature, fully dense oriented films were produced.

Original languageEnglish
Pages (from-to)7-14
Number of pages8
JournalSurface and Coatings Technology
Issue number1
Publication statusPublished - 4 Jun 2001


  • [C] Liquid injection
  • [C] Pulsed chemical vapor deposition
  • [C]Metalorganic chemical vapor deposition
  • [D] Ceramic films
  • [D] Titanium oxide

ASJC Scopus subject areas

  • Chemistry(all)
  • Condensed Matter Physics
  • Surfaces and Interfaces
  • Surfaces, Coatings and Films
  • Materials Chemistry


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