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GROWTH OF OXIDE LAYERS ON Si USING LASER RADIATION.
I. W. Boyd, J. I B Wilson
School of Engineering & Physical Sciences
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INIS
growth
100%
oxides
100%
laser radiation
100%
lasers
66%
oxidation
33%
carbon dioxide
33%
carbon dioxide lasers
33%
argon ions
33%
Material Science
Oxide Compound
100%
Oxidation Reaction
50%
Engineering
Argon Ion Laser
100%