Glass frit as a hermetic joining layer in laser based joining of miniature devices

Qiang Wu, Norbert Lorenz, Kevin M. Cannon, Duncan P. Hand

Research output: Contribution to journalArticle

19 Citations (Scopus)

Abstract

In this paper, we investigate the feasibility of using a laser as the heat source to drive a hermetic joining process based on a glass frit intermediate layer. The laser allows the necessary heat energy to be provided in a localized manner; important either as part of a multistage process, or to allow thermally-sensitive materials to be used inside the package. Our study includes an investigation of the impact of rough and grooved surfaces on the hermeticity and strength of the join, demonstrating the robust nature of the process, and its ability to allow feed-throughs to the center of package. Hermetic sealing is demonstrated, with leak rates of 10-9 mbar l s-1, satisfying the military standard MIL-STD-883G. © 2006 IEEE.

Original languageEnglish
Article number5482384
Pages (from-to)470-477
Number of pages8
JournalIEEE Transactions on Components and Packaging Technologies
Volume33
Issue number2
DOIs
Publication statusPublished - Jun 2010

Keywords

  • Glass frit
  • Laser joining

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