Focussed Ion Beam (FIB) machining has been demonstrated to be capable of fabricating nano and micro-structure elements. In this paper we demonstrate techniques to design and fabricate a 45 degrees mirror on the end of both conventional single mode and multi-core fibres (MCF) using FIB processing. The mirror is finished by a two step process: first a scanning process is used to make a rough cut followed by a polishing process to create an optical surface finish. The machined 45 degrees mirror can be accurately aligned with optical fibre core, which avoids issues associated with the alignment of external turning mirror components.
Proof-of-concept tests demonstrate that the fabricated structure is capable of measuring two axis displacements interferometrically with a maximum displacement up to 1.0mm and an rms error of similar to 50nm.
|Title of host publication||Fifth European Workshop on Optical Fibre Sensors|
|Editors||Leszek R Jaroszewicz|
|Number of pages||4|
|Publication status||Published - 2013|
|Event||5th European Workshop on Optical Fibre Sensors - Kraków, Poland|
Duration: 19 May 2013 → 22 May 2013
|Name||Proceedings of SPIE|
|Conference||5th European Workshop on Optical Fibre Sensors|
|Period||19/05/13 → 22/05/13|
- Focussed ion beam
- 45 degrees mirror