Focussed ion beam machining of an in-fibre 45° mirror for fibre end sensors

Jun Li; Jining Sun; M. M. Miliar; James Millar Ritchie; X Luo; Robert Raimund Josef Maier; Duncan Paul Hand; William Neil MacPherson

doi:10.1117/12.2025714

Focussed ion beam machining of an in-fibre 45° mirror for fibre end sensors

Jun Li, Jining Sun, M. M. Miliar, James Millar Ritchie, X Luo, Robert Raimund Josef Maier, Duncan Paul Hand, William Neil MacPherson

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

2 Citations (Scopus)

Abstract

Focussed Ion Beam (FIB) machining has been demonstrated to be capable of fabricating nano and micro-structure elements. In this paper we demonstrate techniques to design and fabricate a 45 degrees mirror on the end of both conventional single mode and multi-core fibres (MCF) using FIB processing. The mirror is finished by a two step process: first a scanning process is used to make a rough cut followed by a polishing process to create an optical surface finish. The machined 45 degrees mirror can be accurately aligned with optical fibre core, which avoids issues associated with the alignment of external turning mirror components.

Proof-of-concept tests demonstrate that the fabricated structure is capable of measuring two axis displacements interferometrically with a maximum displacement up to 1.0mm and an rms error of similar to 50nm.

Original language	English
Title of host publication	Fifth European Workshop on Optical Fibre Sensors
Editors	Leszek R Jaroszewicz
Publisher	SPIE
Number of pages	4
Volume	8794
ISBN (Print)	978-0-8194-9634-8
DOIs	https://doi.org/10.1117/12.2025714
Publication status	Published - 2013
Event	5th European Workshop on Optical Fibre Sensors - Kraków, Poland Duration: 19 May 2013 → 22 May 2013

Publication series

Name	Proceedings of SPIE
Volume	8794
ISSN (Print)	1996-756X
ISSN (Electronic)	0277-786X

Conference

Conference	5th European Workshop on Optical Fibre Sensors
Country/Territory	Poland
City	Kraków
Period	19/05/13 → 22/05/13

Keywords

Micro-machining
Focussed ion beam
45 degrees mirror
sensing

Access to Document

10.1117/12.2025714

Cite this

@inproceedings{2caf3e71198c4a33aea6e1d2faa811e9,

title = "Focussed ion beam machining of an in-fibre 45° mirror for fibre end sensors",

abstract = "Focussed Ion Beam (FIB) machining has been demonstrated to be capable of fabricating nano and micro-structure elements. In this paper we demonstrate techniques to design and fabricate a 45 degrees mirror on the end of both conventional single mode and multi-core fibres (MCF) using FIB processing. The mirror is finished by a two step process: first a scanning process is used to make a rough cut followed by a polishing process to create an optical surface finish. The machined 45 degrees mirror can be accurately aligned with optical fibre core, which avoids issues associated with the alignment of external turning mirror components. Proof-of-concept tests demonstrate that the fabricated structure is capable of measuring two axis displacements interferometrically with a maximum displacement up to 1.0mm and an rms error of similar to 50nm.",

keywords = "Micro-machining, Focussed ion beam, 45 degrees mirror, sensing",

author = "Jun Li and Jining Sun and Miliar, {M. M.} and Ritchie, {James Millar} and X Luo and Maier, {Robert Raimund Josef} and Hand, {Duncan Paul} and MacPherson, {William Neil}",

year = "2013",

doi = "10.1117/12.2025714",

language = "English",

isbn = "978-0-8194-9634-8",

volume = "8794",

series = "Proceedings of SPIE",

publisher = "SPIE",

editor = "Jaroszewicz, {Leszek R}",

booktitle = "Fifth European Workshop on Optical Fibre Sensors",

address = "United States",

note = "5th European Workshop on Optical Fibre Sensors ; Conference date: 19-05-2013 Through 22-05-2013",

}

Li, J, Sun, J, Miliar, MM, Ritchie, JM, Luo, X, Maier, RRJ, Hand, DP & MacPherson, WN 2013, Focussed ion beam machining of an in-fibre 45° mirror for fibre end sensors. in LR Jaroszewicz (ed.), Fifth European Workshop on Optical Fibre Sensors. vol. 8794, Proceedings of SPIE, vol. 8794, SPIE, 5th European Workshop on Optical Fibre Sensors, Kraków, Poland, 19/05/13. https://doi.org/10.1117/12.2025714

TY - GEN

T1 - Focussed ion beam machining of an in-fibre 45° mirror for fibre end sensors

AU - Li, Jun

AU - Sun, Jining

AU - Miliar, M. M.

AU - Ritchie, James Millar

AU - Luo, X

AU - Maier, Robert Raimund Josef

AU - Hand, Duncan Paul

AU - MacPherson, William Neil

PY - 2013

Y1 - 2013

N2 - Focussed Ion Beam (FIB) machining has been demonstrated to be capable of fabricating nano and micro-structure elements. In this paper we demonstrate techniques to design and fabricate a 45 degrees mirror on the end of both conventional single mode and multi-core fibres (MCF) using FIB processing. The mirror is finished by a two step process: first a scanning process is used to make a rough cut followed by a polishing process to create an optical surface finish. The machined 45 degrees mirror can be accurately aligned with optical fibre core, which avoids issues associated with the alignment of external turning mirror components. Proof-of-concept tests demonstrate that the fabricated structure is capable of measuring two axis displacements interferometrically with a maximum displacement up to 1.0mm and an rms error of similar to 50nm.

AB - Focussed Ion Beam (FIB) machining has been demonstrated to be capable of fabricating nano and micro-structure elements. In this paper we demonstrate techniques to design and fabricate a 45 degrees mirror on the end of both conventional single mode and multi-core fibres (MCF) using FIB processing. The mirror is finished by a two step process: first a scanning process is used to make a rough cut followed by a polishing process to create an optical surface finish. The machined 45 degrees mirror can be accurately aligned with optical fibre core, which avoids issues associated with the alignment of external turning mirror components. Proof-of-concept tests demonstrate that the fabricated structure is capable of measuring two axis displacements interferometrically with a maximum displacement up to 1.0mm and an rms error of similar to 50nm.

KW - Micro-machining

KW - Focussed ion beam

KW - 45 degrees mirror

KW - sensing

U2 - 10.1117/12.2025714

DO - 10.1117/12.2025714

M3 - Conference contribution

SN - 978-0-8194-9634-8

VL - 8794

T3 - Proceedings of SPIE

BT - Fifth European Workshop on Optical Fibre Sensors

A2 - Jaroszewicz, Leszek R

PB - SPIE

T2 - 5th European Workshop on Optical Fibre Sensors

Y2 - 19 May 2013 through 22 May 2013

ER -

Focussed ion beam machining of an in-fibre 45° mirror for fibre end sensors

Abstract

Publication series

Conference

Keywords

Access to Document

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Cite this