Focussed ion beam machining of an in-fibre 45° mirror for fibre end sensors

Jun Li, Jining Sun, M. M. Miliar, James Millar Ritchie, X Luo, Robert Raimund Josef Maier, Duncan Paul Hand, William Neil MacPherson

Research output: Chapter in Book/Report/Conference proceedingConference contribution

2 Citations (Scopus)

Abstract

Focussed Ion Beam (FIB) machining has been demonstrated to be capable of fabricating nano and micro-structure elements. In this paper we demonstrate techniques to design and fabricate a 45 degrees mirror on the end of both conventional single mode and multi-core fibres (MCF) using FIB processing. The mirror is finished by a two step process: first a scanning process is used to make a rough cut followed by a polishing process to create an optical surface finish. The machined 45 degrees mirror can be accurately aligned with optical fibre core, which avoids issues associated with the alignment of external turning mirror components.

Proof-of-concept tests demonstrate that the fabricated structure is capable of measuring two axis displacements interferometrically with a maximum displacement up to 1.0mm and an rms error of similar to 50nm.

Original languageEnglish
Title of host publicationFifth European Workshop on Optical Fibre Sensors
EditorsLeszek R Jaroszewicz
PublisherSPIE
Number of pages4
Volume8794
ISBN (Print)978-0-8194-9634-8
DOIs
Publication statusPublished - 2013
Event5th European Workshop on Optical Fibre Sensors - Kraków, Poland
Duration: 19 May 201322 May 2013

Publication series

NameProceedings of SPIE
Volume8794
ISSN (Print)1996-756X
ISSN (Electronic)0277-786X

Conference

Conference5th European Workshop on Optical Fibre Sensors
CountryPoland
CityKraków
Period19/05/1322/05/13

Keywords

  • Micro-machining
  • Focussed ion beam
  • 45 degrees mirror
  • sensing

Cite this

Li, J., Sun, J., Miliar, M. M., Ritchie, J. M., Luo, X., Maier, R. R. J., Hand, D. P., & MacPherson, W. N. (2013). Focussed ion beam machining of an in-fibre 45° mirror for fibre end sensors. In L. R. Jaroszewicz (Ed.), Fifth European Workshop on Optical Fibre Sensors (Vol. 8794). (Proceedings of SPIE; Vol. 8794). SPIE. https://doi.org/10.1117/12.2025714