Fill-factor improvement of Si CMOS single-photon avalanche diode detector arrays by integration of diffractive microlens arrays

Giuseppe Intermite, Aongus McCarthy, Ryan E Warburton, Ximing Ren, Federica Villa, Rudi Lussana, Andrew John Waddie, Mohammad Reza Taghizadeh, Alberto Tosi, Franco Zappa, Gerald Stuart Buller

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29 Citations (Scopus)

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