Fill-factor improvement of Si CMOS single-photon avalanche diode detector arrays by integration of diffractive microlens arrays

Giuseppe Intermite; Aongus McCarthy; Ryan E Warburton; Ximing Ren; Federica Villa; Rudi Lussana; Andrew John Waddie; Mohammad Reza Taghizadeh; Alberto Tosi; Franco Zappa; Gerald Stuart Buller

doi:10.1364/OE.23.033777

Fill-factor improvement of Si CMOS single-photon avalanche diode detector arrays by integration of diffractive microlens arrays

Giuseppe Intermite, Aongus McCarthy, Ryan E Warburton, Ximing Ren, Federica Villa, Rudi Lussana, Andrew John Waddie, Mohammad Reza Taghizadeh, Alberto Tosi, Franco Zappa, Gerald Stuart Buller

Research output: Contribution to journal › Article › peer-review

39 Citations (Scopus)

Abstract

Single-photon avalanche diode (SPAD) detector arrays generally suffer from having a low fill-factor, in which the photo-sensitive area of each pixel is small compared to the overall area of the pixel. This paper describes the integration of different configurations of high efficiency diffractive optical microlens arrays onto a 32 × 32 SPAD array, fabricated using a 0.35 μm CMOS technology process. The characterization of SPAD arrays with integrated microlens arrays is reported over the spectral range of 500-900 nm, and a range of f-numbers from f/2 to f/22. We report an average concentration factor of 15 measured for the entire SPAD array with integrated microlens array. The integrated SPAD and microlens array demonstrated a very high uniformity in overall efficiency.

Original language	English
Pages (from-to)	33777-33791
Number of pages	15
Journal	Optics Express
Volume	23
Issue number	26
DOIs	https://doi.org/10.1364/OE.23.033777
Publication status	Published - 28 Dec 2015

Keywords

Photon counting
Avalanche photodiodes (APDs)
Micro-optics
Arrays
Micro-optical devices

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10.1364/OE.23.033777

Cite this

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title = "Fill-factor improvement of Si CMOS single-photon avalanche diode detector arrays by integration of diffractive microlens arrays",

abstract = "Single-photon avalanche diode (SPAD) detector arrays generally suffer from having a low fill-factor, in which the photo-sensitive area of each pixel is small compared to the overall area of the pixel. This paper describes the integration of different configurations of high efficiency diffractive optical microlens arrays onto a 32 × 32 SPAD array, fabricated using a 0.35 μm CMOS technology process. The characterization of SPAD arrays with integrated microlens arrays is reported over the spectral range of 500-900 nm, and a range of f-numbers from f/2 to f/22. We report an average concentration factor of 15 measured for the entire SPAD array with integrated microlens array. The integrated SPAD and microlens array demonstrated a very high uniformity in overall efficiency.",

keywords = "Photon counting, Avalanche photodiodes (APDs), Micro-optics, Arrays, Micro-optical devices",

author = "Giuseppe Intermite and Aongus McCarthy and Warburton, {Ryan E} and Ximing Ren and Federica Villa and Rudi Lussana and Waddie, {Andrew John} and Taghizadeh, {Mohammad Reza} and Alberto Tosi and Franco Zappa and Buller, {Gerald Stuart}",

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doi = "10.1364/OE.23.033777",

language = "English",

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journal = "Optics Express",

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T1 - Fill-factor improvement of Si CMOS single-photon avalanche diode detector arrays by integration of diffractive microlens arrays

AU - Intermite, Giuseppe

AU - McCarthy, Aongus

AU - Warburton, Ryan E

AU - Ren, Ximing

AU - Villa, Federica

AU - Lussana, Rudi

AU - Waddie, Andrew John

AU - Taghizadeh, Mohammad Reza

AU - Tosi, Alberto

AU - Zappa, Franco

AU - Buller, Gerald Stuart

PY - 2015/12/28

Y1 - 2015/12/28

N2 - Single-photon avalanche diode (SPAD) detector arrays generally suffer from having a low fill-factor, in which the photo-sensitive area of each pixel is small compared to the overall area of the pixel. This paper describes the integration of different configurations of high efficiency diffractive optical microlens arrays onto a 32 × 32 SPAD array, fabricated using a 0.35 μm CMOS technology process. The characterization of SPAD arrays with integrated microlens arrays is reported over the spectral range of 500-900 nm, and a range of f-numbers from f/2 to f/22. We report an average concentration factor of 15 measured for the entire SPAD array with integrated microlens array. The integrated SPAD and microlens array demonstrated a very high uniformity in overall efficiency.

AB - Single-photon avalanche diode (SPAD) detector arrays generally suffer from having a low fill-factor, in which the photo-sensitive area of each pixel is small compared to the overall area of the pixel. This paper describes the integration of different configurations of high efficiency diffractive optical microlens arrays onto a 32 × 32 SPAD array, fabricated using a 0.35 μm CMOS technology process. The characterization of SPAD arrays with integrated microlens arrays is reported over the spectral range of 500-900 nm, and a range of f-numbers from f/2 to f/22. We report an average concentration factor of 15 measured for the entire SPAD array with integrated microlens array. The integrated SPAD and microlens array demonstrated a very high uniformity in overall efficiency.

KW - Photon counting

KW - Avalanche photodiodes (APDs)

KW - Micro-optics

KW - Arrays

KW - Micro-optical devices

U2 - 10.1364/OE.23.033777

DO - 10.1364/OE.23.033777

M3 - Article

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SN - 1094-4087

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SP - 33777

EP - 33791

JO - Optics Express

JF - Optics Express

IS - 26

ER -

Fill-factor improvement of Si CMOS single-photon avalanche diode detector arrays by integration of diffractive microlens arrays

Abstract

Keywords

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