Fabrication process of a micro-inductor utilising a magnetic thin film core

David Flynn; Marc Phillipe Yves Desmulliez; Anthony Toon

Fabrication process of a micro-inductor utilising a magnetic thin film core

David Flynn, Marc Phillipe Yves Desmulliez, Anthony Toon

Research output: Contribution to conference › Paper › peer-review

Abstract

Thin film magnetic alloys incorporated into microscale magnetic components are investigated as a potential solution to the increased power density required
in power supplies of fast switching frequencies. The performances of direct current and Pulse Reverse (PR) electrodeposited permalloy and Vitrovac 6025 are
assessed through their inclusion within a solenoid microinductor. A design of experiment (DOE) determined the optimum waveform for (PR) deposition within a sulphate electrolyte. The effects of air-gaps on core performance are also investigated. The fabricated inductors have an inductance ranging from 0.12 to
118 uH.

Original language	English
Pages	38-43
Number of pages	6
Publication status	Published - 30 May 2005
Event	Symposium of Design, Test, Integration and Packaging of Micro-Electro-Mechanical Systems/Micro-Opto-Electro Mechanical Systems - Switzerland , Montreux , Switzerland Duration: 30 May 2005 → 3 Jun 2005 Conference number: ISBN 2-84813-0357-1 http://cmp3.imag.fr/conferences/dtip/DTIP2005/TechnicalProgramme.html

Conference

Conference	Symposium of Design, Test, Integration and Packaging of Micro-Electro-Mechanical Systems/Micro-Opto-Electro Mechanical Systems
Abbreviated title	DTIP 2005
Country/Territory	Switzerland
City	Montreux
Period	30/05/05 → 3/06/05
Internet address	http://cmp3.imag.fr/conferences/dtip/DTIP2005/TechnicalProgramme.html

Keywords

Microinductor
Film deposition

Cite this

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title = "Fabrication process of a micro-inductor utilising a magnetic thin film core",

abstract = "Thin film magnetic alloys incorporated into microscale magnetic components are investigated as a potential solution to the increased power density requiredin power supplies of fast switching frequencies. The performances of direct current and Pulse Reverse (PR) electrodeposited permalloy and Vitrovac 6025 areassessed through their inclusion within a solenoid microinductor. A design of experiment (DOE) determined the optimum waveform for (PR) deposition within a sulphate electrolyte. The effects of air-gaps on core performance are also investigated. The fabricated inductors have an inductance ranging from 0.12 to118 uH.",

keywords = "Microinductor, Film deposition",

author = "David Flynn and Desmulliez, {Marc Phillipe Yves} and Anthony Toon",

year = "2005",

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language = "English",

pages = "38--43",

note = "Symposium of Design, Test, Integration and Packaging of Micro-Electro-Mechanical Systems/Micro-Opto-Electro Mechanical Systems, DTIP 2005 ; Conference date: 30-05-2005 Through 03-06-2005",

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}

Fabrication process of a micro-inductor utilising a magnetic thin film core. / Flynn, David ; Desmulliez, Marc Phillipe Yves; Toon, Anthony.
2005. 38-43 Paper presented at Symposium of Design, Test, Integration and Packaging of Micro-Electro-Mechanical Systems/Micro-Opto-Electro Mechanical Systems, Montreux , Switzerland.

Research output: Contribution to conference › Paper › peer-review

TY - CONF

T1 - Fabrication process of a micro-inductor utilising a magnetic thin film core

AU - Flynn, David

AU - Desmulliez, Marc Phillipe Yves

AU - Toon, Anthony

N1 - Conference code: ISBN 2-84813-0357-1

PY - 2005/5/30

Y1 - 2005/5/30

N2 - Thin film magnetic alloys incorporated into microscale magnetic components are investigated as a potential solution to the increased power density requiredin power supplies of fast switching frequencies. The performances of direct current and Pulse Reverse (PR) electrodeposited permalloy and Vitrovac 6025 areassessed through their inclusion within a solenoid microinductor. A design of experiment (DOE) determined the optimum waveform for (PR) deposition within a sulphate electrolyte. The effects of air-gaps on core performance are also investigated. The fabricated inductors have an inductance ranging from 0.12 to118 uH.

AB - Thin film magnetic alloys incorporated into microscale magnetic components are investigated as a potential solution to the increased power density requiredin power supplies of fast switching frequencies. The performances of direct current and Pulse Reverse (PR) electrodeposited permalloy and Vitrovac 6025 areassessed through their inclusion within a solenoid microinductor. A design of experiment (DOE) determined the optimum waveform for (PR) deposition within a sulphate electrolyte. The effects of air-gaps on core performance are also investigated. The fabricated inductors have an inductance ranging from 0.12 to118 uH.

KW - Microinductor

KW - Film deposition

M3 - Paper

SP - 38

EP - 43

T2 - Symposium of Design, Test, Integration and Packaging of Micro-Electro-Mechanical Systems/Micro-Opto-Electro Mechanical Systems

Y2 - 30 May 2005 through 3 June 2005

ER -

Fabrication process of a micro-inductor utilising a magnetic thin film core

Abstract

Conference

Keywords

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Cite this