Fabrication process of a micro-inductor utilising a magnetic thin film core

Research output: Contribution to conferencePaper

Abstract

Thin film magnetic alloys incorporated into microscale magnetic components are investigated as a potential solution to the increased power density required
in power supplies of fast switching frequencies. The performances of direct current and Pulse Reverse (PR) electrodeposited permalloy and Vitrovac 6025 are
assessed through their inclusion within a solenoid microinductor. A design of experiment (DOE) determined the optimum waveform for (PR) deposition within a sulphate electrolyte. The effects of air-gaps on core performance are also investigated. The fabricated inductors have an inductance ranging from 0.12 to
118 uH.
Original languageEnglish
Pages38-43
Number of pages6
Publication statusPublished - 30 May 2005
EventSymposium of Design, Test, Integration and Packaging of Micro-Electro-Mechanical Systems/Micro-Opto-Electro Mechanical Systems - Switzerland , Montreux , Switzerland
Duration: 30 May 20053 Jun 2005
Conference number: ISBN 2-84813-0357-1
http://cmp3.imag.fr/conferences/dtip/DTIP2005/TechnicalProgramme.html

Conference

ConferenceSymposium of Design, Test, Integration and Packaging of Micro-Electro-Mechanical Systems/Micro-Opto-Electro Mechanical Systems
Abbreviated titleDTIP 2005
CountrySwitzerland
CityMontreux
Period30/05/053/06/05
Internet address

Keywords

  • Microinductor
  • Film deposition

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