Abstract
Thin film magnetic alloys incorporated into microscale magnetic components are investigated as a potential solution to the increased power density required in power supplies of fast switching frequencies. The performances of direct current and Pulse Reverse (PR) electrodeposited permalloy and Vitrovac 6025 are assessed through their inclusion within a solenoid microinductor. A design of experiment (DOE) determined the optimum waveform for (PR) deposition within a sulphate electrolyte. The effects of air-gaps on core performance are also investigated. The fabricated inductors have an inductance ranging from 0.12 to 118 µH.
Original language | English |
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Pages (from-to) | 923-933 |
Number of pages | 11 |
Journal | Microsystem Technologies |
Volume | 12 |
Issue number | 10-11 |
DOIs | |
Publication status | Published - 1 Sept 2006 |