Fabrication process of a micro-inductor utilising a magnetic thin film core

David Flynn, Nirmal Singh Sudan, A. Toon, Marc Phillipe Yves Desmulliez

Research output: Contribution to journalArticle

12 Citations (Scopus)

Abstract

Thin film magnetic alloys incorporated into microscale magnetic components are investigated as a potential solution to the increased power density required in power supplies of fast switching frequencies. The performances of direct current and Pulse Reverse (PR) electrodeposited permalloy and Vitrovac 6025 are assessed through their inclusion within a solenoid microinductor. A design of experiment (DOE) determined the optimum waveform for (PR) deposition within a sulphate electrolyte. The effects of air-gaps on core performance are also investigated. The fabricated inductors have an inductance ranging from 0.12 to 118 µH.

Original languageEnglish
Pages (from-to)923-933
Number of pages11
JournalMicrosystem Technologies
Volume12
Issue number10-11
DOIs
Publication statusPublished - 1 Sep 2006

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