Fabrication process of a micro-inductor utilising a magnetic thin film core

David Flynn; Nirmal Singh Sudan; A. Toon; Marc Phillipe Yves Desmulliez

doi:10.1007/s00542-006-0138-7

Fabrication process of a micro-inductor utilising a magnetic thin film core

David Flynn, Nirmal Singh Sudan, A. Toon, Marc Phillipe Yves Desmulliez

Research output: Contribution to journal › Article › peer-review

13 Citations (Scopus)

Abstract

Thin film magnetic alloys incorporated into microscale magnetic components are investigated as a potential solution to the increased power density required in power supplies of fast switching frequencies. The performances of direct current and Pulse Reverse (PR) electrodeposited permalloy and Vitrovac 6025 are assessed through their inclusion within a solenoid microinductor. A design of experiment (DOE) determined the optimum waveform for (PR) deposition within a sulphate electrolyte. The effects of air-gaps on core performance are also investigated. The fabricated inductors have an inductance ranging from 0.12 to 118 µH.

Original language	English
Pages (from-to)	923-933
Number of pages	11
Journal	Microsystem Technologies
Volume	12
Issue number	10-11
DOIs	https://doi.org/10.1007/s00542-006-0138-7
Publication status	Published - 1 Sept 2006

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Fabrication process of a micro-inductor utilising a magnetic thin film core

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