This paper describes a relatively inexpensive laser-based process for the fabrication of en-closed three-dimensional micro-structures in borosilicate glass substrates. The micro-structures will be used as customized ‘models’ of subsurface systems for the investigation and the validation of simulations of gas/liquid flow and reactive transport processes occurring in porous media at the pore scale level. The fabrication process of these microfluidic devices us-es the same picosecond laser for the generation of micro-structures on glass and for sealing the structures with another glass plate. The laser processing parameters used for micro-machining and welding of glass substrates are described, and the challenges associated with the overall manufacturing process discussed.
|Publication status||Published - Jun 2017|
|Event||18th International Symposium on Laser Precision Microfabrication - Toyama, Japan|
Duration: 5 Jun 2017 → 8 Jun 2017
|Conference||18th International Symposium on Laser Precision Microfabrication|
|Abbreviated title||LPM 2017|
|Period||5/06/17 → 8/06/17|
Wlodarczyk, K. L., Carter, R., Jahanbakhsh, A., Hand, D. P., Maier, R. R. J., & Maroto-Valer, M. M. (2017). Fabrication of three-dimensional micro-structures in glass by picosecond laser micro-machining and welding. Paper presented at 18th International Symposium on Laser Precision Microfabrication, Toyama, Japan.