Fabrication of three-dimensional micro-structures in glass by picosecond laser micro-machining and welding

Krystian Lukasz Wlodarczyk; Richard Carter; Amir Jahanbakhsh; Duncan Paul Hand; Robert Raimund Josef Maier; M. Mercedes Maroto-Valer

Fabrication of three-dimensional micro-structures in glass by picosecond laser micro-machining and welding

Krystian Lukasz Wlodarczyk, Richard Carter, Amir Jahanbakhsh, Duncan Paul Hand, Robert Raimund Josef Maier, M. Mercedes Maroto-Valer

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Abstract

This paper describes a relatively inexpensive laser-based process for the fabrication of en-closed three-dimensional micro-structures in borosilicate glass substrates. The micro-structures will be used as customized ‘models’ of subsurface systems for the investigation and the validation of simulations of gas/liquid flow and reactive transport processes occurring in porous media at the pore scale level. The fabrication process of these microfluidic devices us-es the same picosecond laser for the generation of micro-structures on glass and for sealing the structures with another glass plate. The laser processing parameters used for micro-machining and welding of glass substrates are described, and the challenges associated with the overall manufacturing process discussed.

Original language	English
Publication status	Published - Jun 2017
Event	18th International Symposium on Laser Precision Microfabrication - Toyama, Japan Duration: 5 Jun 2017 → 8 Jun 2017

Conference

Conference	18th International Symposium on Laser Precision Microfabrication
Abbreviated title	LPM 2017
Country/Territory	Japan
City	Toyama
Period	5/06/17 → 8/06/17

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Copyright 2017 Japan Laser Processing Society. This paper was (will be) published in Proceedings of LPM 2017 and is made available as an electronic reprint (preprint) with permission of JLPS. One print or electronic copy may be made for personal use only. Systematic or multiple reproduction, distribution to multiple loca-tions via electronic or other means, duplication of any material in this paper for a fee or for commercial purposes, or modification of the content of the paper are prohibited.
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title = "Fabrication of three-dimensional micro-structures in glass by picosecond laser micro-machining and welding",

abstract = "This paper describes a relatively inexpensive laser-based process for the fabrication of en-closed three-dimensional micro-structures in borosilicate glass substrates. The micro-structures will be used as customized {\textquoteleft}models{\textquoteright} of subsurface systems for the investigation and the validation of simulations of gas/liquid flow and reactive transport processes occurring in porous media at the pore scale level. The fabrication process of these microfluidic devices us-es the same picosecond laser for the generation of micro-structures on glass and for sealing the structures with another glass plate. The laser processing parameters used for micro-machining and welding of glass substrates are described, and the challenges associated with the overall manufacturing process discussed.",

author = "Wlodarczyk, {Krystian Lukasz} and Richard Carter and Amir Jahanbakhsh and Hand, {Duncan Paul} and Maier, {Robert Raimund Josef} and Maroto-Valer, {M. Mercedes}",

year = "2017",

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language = "English",

note = "18th International Symposium on Laser Precision Microfabrication, LPM 2017 ; Conference date: 05-06-2017 Through 08-06-2017",

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T1 - Fabrication of three-dimensional micro-structures in glass by picosecond laser micro-machining and welding

AU - Wlodarczyk, Krystian Lukasz

AU - Carter, Richard

AU - Jahanbakhsh, Amir

AU - Hand, Duncan Paul

AU - Maier, Robert Raimund Josef

AU - Maroto-Valer, M. Mercedes

PY - 2017/6

Y1 - 2017/6

N2 - This paper describes a relatively inexpensive laser-based process for the fabrication of en-closed three-dimensional micro-structures in borosilicate glass substrates. The micro-structures will be used as customized ‘models’ of subsurface systems for the investigation and the validation of simulations of gas/liquid flow and reactive transport processes occurring in porous media at the pore scale level. The fabrication process of these microfluidic devices us-es the same picosecond laser for the generation of micro-structures on glass and for sealing the structures with another glass plate. The laser processing parameters used for micro-machining and welding of glass substrates are described, and the challenges associated with the overall manufacturing process discussed.

AB - This paper describes a relatively inexpensive laser-based process for the fabrication of en-closed three-dimensional micro-structures in borosilicate glass substrates. The micro-structures will be used as customized ‘models’ of subsurface systems for the investigation and the validation of simulations of gas/liquid flow and reactive transport processes occurring in porous media at the pore scale level. The fabrication process of these microfluidic devices us-es the same picosecond laser for the generation of micro-structures on glass and for sealing the structures with another glass plate. The laser processing parameters used for micro-machining and welding of glass substrates are described, and the challenges associated with the overall manufacturing process discussed.

M3 - Paper

T2 - 18th International Symposium on Laser Precision Microfabrication

Y2 - 5 June 2017 through 8 June 2017

ER -

Fabrication of three-dimensional micro-structures in glass by picosecond laser micro-machining and welding

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