This paper describes a relatively inexpensive laser-based process for the fabrication of en-closed three-dimensional micro-structures in borosilicate glass substrates. The micro-structures will be used as customized ‘models’ of subsurface systems for the investigation and the validation of simulations of gas/liquid flow and reactive transport processes occurring in porous media at the pore scale level. The fabrication process of these microfluidic devices us-es the same picosecond laser for the generation of micro-structures on glass and for sealing the structures with another glass plate. The laser processing parameters used for micro-machining and welding of glass substrates are described, and the challenges associated with the overall manufacturing process discussed.
|Publication status||Published - Jun 2017|
|Event||18th International Symposium on Laser Precision Microfabrication - Toyama, Japan|
Duration: 5 Jun 2017 → 8 Jun 2017
|Conference||18th International Symposium on Laser Precision Microfabrication|
|Abbreviated title||LPM 2017|
|Period||5/06/17 → 8/06/17|