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Abstract

This paper describes a relatively inexpensive laser-based process for the fabrication of en-closed three-dimensional micro-structures in borosilicate glass substrates. The micro-structures will be used as customized ‘models’ of subsurface systems for the investigation and the validation of simulations of gas/liquid flow and reactive transport processes occurring in porous media at the pore scale level. The fabrication process of these microfluidic devices us-es the same picosecond laser for the generation of micro-structures on glass and for sealing the structures with another glass plate. The laser processing parameters used for micro-machining and welding of glass substrates are described, and the challenges associated with the overall manufacturing process discussed.
Original languageEnglish
Publication statusPublished - Jun 2017
Event18th International Symposium on Laser Precision Microfabrication - Toyama, Japan
Duration: 5 Jun 20178 Jun 2017

Conference

Conference18th International Symposium on Laser Precision Microfabrication
Abbreviated titleLPM 2017
CountryJapan
CityToyama
Period5/06/178/06/17

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    Wlodarczyk, K. L., Carter, R., Jahanbakhsh, A., Hand, D. P., Maier, R. R. J., & Maroto-Valer, M. M. (2017). Fabrication of three-dimensional micro-structures in glass by picosecond laser micro-machining and welding. Paper presented at 18th International Symposium on Laser Precision Microfabrication, Toyama, Japan.