Abstract
This paper presents a scalable hybrid molecular nanofabrication approach of sub-10 nm patterns with functionalized surfaces by combining "bottom-up" surface initiated polymerization (SIP) with "top-down" electron beam lithography (EBL). This prototype molecular nanofabrication is based on the concept of nanolithography-based molecular manipulation (NMM). The strategy is to apply free-radical SIP ("bottom-up") to the non-molecularly engineered and chemically inert nano-patterns prepared by "top-down" nanolithography, e.g. EBL. This integration can minimize feature sizes to molecular length scales (sub-10 nm) and simultaneously tune the surface chemistry of the nano-patterns through functional polymer brushes. In this work, 4 nm nanostructures have been obtained which are chemically functionalized by poly(vinyl pyridine) (PVP).
Original language | English |
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Title of host publication | TRANSDUCERS 2009 - 15th International Conference on Solid-State Sensors, Actuators and Microsystems |
Publisher | IEEE |
Pages | 449-452 |
Number of pages | 4 |
ISBN (Electronic) | 978-1-4244-4193-8 |
ISBN (Print) | 978-1-4244-4190-7 |
DOIs | |
Publication status | Published - 2009 |
Event | 15th International Conference on Solid-State Sensors, Actuators and Microsystems - Denver, CO, United States Duration: 21 Jun 2009 → 25 Jun 2009 |
Conference
Conference | 15th International Conference on Solid-State Sensors, Actuators and Microsystems |
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Abbreviated title | TRANSDUCERS 2009 |
Country/Territory | United States |
City | Denver, CO |
Period | 21/06/09 → 25/06/09 |
Keywords
- Chemically tunable functionality
- Molecular nanotechnology
- Nanofabrication
- Surface initiated polymerization
ASJC Scopus subject areas
- Hardware and Architecture
- Electrical and Electronic Engineering