Fabrication of high power RF MEMS switches

Ling Wang, Zheng Cui, Jia Sheng Hong, Eamon P. McErlean, Robert B. Greed, Daniel C. Voyce

Research output: Contribution to journalArticle

Abstract

High power RF MEMS switches have been designed and fabricated. The switches are composed of a matrix of ohmic contact cantilevers and bridges. Optimized fabrication processes have been developed to improve planarization on contact surface and reduce residual stress in switch beams, which ensure a reasonable flat and smooth cantilever and membrane bridge for operation at high RF power and low actuation voltage. Crown Copyright © 2006.

Original languageEnglish
Pages (from-to)1418-1420
Number of pages3
JournalMicroelectronic Engineering
Volume83
Issue number4-9 SPEC. ISS.
DOIs
Publication statusPublished - Apr 2006

Fingerprint

MEMS
Switches
Fabrication
Ohmic contacts
Residual stresses
Membranes
Electric potential

Keywords

  • Membrane residual stress
  • MEMS
  • Planarization
  • RF switches

Cite this

Wang, L., Cui, Z., Hong, J. S., McErlean, E. P., Greed, R. B., & Voyce, D. C. (2006). Fabrication of high power RF MEMS switches. Microelectronic Engineering, 83(4-9 SPEC. ISS.), 1418-1420. https://doi.org/10.1016/j.mee.2006.01.067
Wang, Ling ; Cui, Zheng ; Hong, Jia Sheng ; McErlean, Eamon P. ; Greed, Robert B. ; Voyce, Daniel C. / Fabrication of high power RF MEMS switches. In: Microelectronic Engineering. 2006 ; Vol. 83, No. 4-9 SPEC. ISS. pp. 1418-1420.
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Wang, L, Cui, Z, Hong, JS, McErlean, EP, Greed, RB & Voyce, DC 2006, 'Fabrication of high power RF MEMS switches', Microelectronic Engineering, vol. 83, no. 4-9 SPEC. ISS., pp. 1418-1420. https://doi.org/10.1016/j.mee.2006.01.067

Fabrication of high power RF MEMS switches. / Wang, Ling; Cui, Zheng; Hong, Jia Sheng; McErlean, Eamon P.; Greed, Robert B.; Voyce, Daniel C.

In: Microelectronic Engineering, Vol. 83, No. 4-9 SPEC. ISS., 04.2006, p. 1418-1420.

Research output: Contribution to journalArticle

TY - JOUR

T1 - Fabrication of high power RF MEMS switches

AU - Wang, Ling

AU - Cui, Zheng

AU - Hong, Jia Sheng

AU - McErlean, Eamon P.

AU - Greed, Robert B.

AU - Voyce, Daniel C.

PY - 2006/4

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KW - Membrane residual stress

KW - MEMS

KW - Planarization

KW - RF switches

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Wang L, Cui Z, Hong JS, McErlean EP, Greed RB, Voyce DC. Fabrication of high power RF MEMS switches. Microelectronic Engineering. 2006 Apr;83(4-9 SPEC. ISS.):1418-1420. https://doi.org/10.1016/j.mee.2006.01.067