Epitaxy of diamond on silicon

David Milne, P. G. Roberts, P. John, M. G. Jubber, M. Liehr, J. I B Wilson

Research output: Contribution to journalArticle

Abstract

Localized heteroepitaxial growth of diamond on (100) silicon was investigated using microwave plasma deposition. The final growth was performed in hydrogen-carbon-monoxide-methane gas mixtures conducive to (100) texturing of the crystallites. The deposition was preceded by either a single or two-stage in situ bias treatment to enhance the nucleation density. An initial carburization stage was not found to be essential although the inclusion of this step reduced the bias period required for epitaxy. The bias current-time characteristics exhibit features which could be interpreted as changes in the chemical composition of the nucleation layer. Epitaxial films were produced with grain sizes of 15-20 µm. © 1995.

Original languageEnglish
Pages (from-to)394-400
Number of pages7
JournalDiamond and Related Materials
Volume4
Issue number4
Publication statusPublished - 15 Apr 1995

Keywords

  • Diamond
  • Heteroepitaxy
  • Nucleation

Fingerprint Dive into the research topics of 'Epitaxy of diamond on silicon'. Together they form a unique fingerprint.

  • Cite this

    Milne, D., Roberts, P. G., John, P., Jubber, M. G., Liehr, M., & Wilson, J. I. B. (1995). Epitaxy of diamond on silicon. Diamond and Related Materials, 4(4), 394-400.