Enhanced light collection from solid-state qubits in silicon carbide through grayscale hard-mask lithography

Christiaan Bekker*, Alexander Jones, Xingrui Cheng, Patrick Salter, Jason Smith, Muhammad J. Arshad, Pasquale Cilibrizzi, Peter Lomax, Graham S. Wood, Rebecca Cheung, Wolfgang Knolle, Neil Ross, Brian Gerardot, Cristian Bonato

*Corresponding author for this work

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Abstract

A scalable, shape-controllable method for nanofabrication of high-aspect-ratio microlenses in silicon carbide is presented. Light collection from these lenses is investigated, and an enhancement in collection efficiency of a factor 4.4±1.0 is demonstrated.

Original languageEnglish
Title of host publicationQuantum 2.0 2024
PublisherOPTICA Publishing Group
ISBN (Electronic)9781557525185
DOIs
Publication statusPublished - 2024
EventQuantum 2.0 Conference and Exhibition 2024 - Rotterdam, Netherlands
Duration: 23 Jun 202427 Jun 2024

Conference

ConferenceQuantum 2.0 Conference and Exhibition 2024
Country/TerritoryNetherlands
CityRotterdam
Period23/06/2427/06/24

ASJC Scopus subject areas

  • General Computer Science
  • Space and Planetary Science
  • Control and Systems Engineering
  • Electrical and Electronic Engineering
  • Electronic, Optical and Magnetic Materials
  • Instrumentation
  • Atomic and Molecular Physics, and Optics

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