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Enhanced antimony activation for ultra-shallow junctions in strained silicon
Nick Bennett*, A. J. Smith, C. S. Beer, L. O'Reilly, B. Colombeau, G. D. Dilliway, R. Harper, Patrick J. McNally, Russell Gwilliam, Nick E. B. Cowern, B. J. Sealy
*Corresponding author for this work
Research output: Chapter in Book/Report/Conference proceeding › Conference contribution
4
Citations
(Scopus)