TY - JOUR
T1 - Embedded micromachined fiber-optic Fabry-Perot pressure sensors in aerodynamics applications
AU - Gander, Matthew James
AU - MacPherson, William Neil
AU - Barton, James S
AU - Reuben, Robert Lewis
AU - Jones, Julian David Clayton
AU - Stevens, R
AU - Chana, Kam S
AU - Andersen, S J
AU - Jones, T V
PY - 2003/2
Y1 - 2003/2
N2 - Small size, high bandwidth pressure sensors are required for instrumentation of probes and test models in aerodynamic studies of complex unsteady flows. Optical-fiber pressure sensors promise potential advantages of small size and low cost in comparison with their electrical counterparts. We describe miniature Fabry-Perot cavity pressure sensors constructed by micromachining techniques in a turbine test application. The sensor bodies are 500-mum squared, 300-mum deep with a similar to2-mum-thick copper diaphragm electroplated on one face. The sensor cavity is formed between the diaphragm and the cleaved end of a singlemode fiber sealed to the sensor by epoxy. Each sensor is addressed interferometrically in reflection by three wavelengths simultaneously, giving an unambiguous phase determination; a pressure sensitivity of 1.6 rad bar(-1) was measured, with a typical range of vacuum to 600 kPa. Five sensors were embedded in the trailing edge of a nozzle guide vane installed upstream of a rotor in a full-scale turbine stage transient test facility. Pressure signals in the trailing edge flow show marked structure at the 8-kHz blade passing frequency. To our knowledge, this is the first report of sensors located at the trailing edge of a normal-sized turbine blade.
AB - Small size, high bandwidth pressure sensors are required for instrumentation of probes and test models in aerodynamic studies of complex unsteady flows. Optical-fiber pressure sensors promise potential advantages of small size and low cost in comparison with their electrical counterparts. We describe miniature Fabry-Perot cavity pressure sensors constructed by micromachining techniques in a turbine test application. The sensor bodies are 500-mum squared, 300-mum deep with a similar to2-mum-thick copper diaphragm electroplated on one face. The sensor cavity is formed between the diaphragm and the cleaved end of a singlemode fiber sealed to the sensor by epoxy. Each sensor is addressed interferometrically in reflection by three wavelengths simultaneously, giving an unambiguous phase determination; a pressure sensitivity of 1.6 rad bar(-1) was measured, with a typical range of vacuum to 600 kPa. Five sensors were embedded in the trailing edge of a nozzle guide vane installed upstream of a rotor in a full-scale turbine stage transient test facility. Pressure signals in the trailing edge flow show marked structure at the 8-kHz blade passing frequency. To our knowledge, this is the first report of sensors located at the trailing edge of a normal-sized turbine blade.
KW - interferometry
KW - micromachining
KW - optical fiber
KW - pressure measurement
KW - TURBOMACHINES
KW - FLOWS
UR - http://www.scopus.com/inward/record.url?scp=3042820707&partnerID=8YFLogxK
U2 - 10.1109/JSEN.2003.810099
DO - 10.1109/JSEN.2003.810099
M3 - Article
VL - 3
SP - 102
EP - 107
JO - IEEE Sensors Journal
JF - IEEE Sensors Journal
IS - 1
ER -