This paper presents a study of the behaviour of electrically actuated RF-MEMS switches with ohmic contact. We will discuss about the relationship between the actuation voltage, displacement and the corresponding contact force experienced by the switch. We will demonstrate the linear behaviour of the switch when factors such as width or length of the switch arm are varied. Experimental results for DC actuation are also presented.
|Title of host publication||35th European Microwave Conference 2005 - Conference Proceedings|
|Number of pages||4|
|Publication status||Published - 2005|
|Event||GAAS 2005 - 13th European Gallium Arsenide and Other Compound Semiconductors Application Symposium - Paris, France|
Duration: 3 Oct 2005 → 4 Oct 2005
|Conference||GAAS 2005 - 13th European Gallium Arsenide and Other Compound Semiconductors Application Symposium|
|Period||3/10/05 → 4/10/05|