Electrode ablation on piezoelectric ceramics by NS-pulsed laser ablation for sensor applications

Stephan Kloss, R. W C Lewis, Andrew Dent, Nick Weston, Kevyn Jonas, Chris R. Bowen, Duncan P. Hand, Jonathan D. Shephard

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Abstract

This paper discusses the formation of complex geometry electrode structures on piezoelectric ceramic substrates using nanosecond pulsed laser ablation. Optical microscopy, scanning electron microscopy and surface profiling are used to examine the impact of the laser ablation process onto the substrate material. The influence of laser power, pulse energy and scanning speed on electrode removal and potential substrate damage is discussed. Fabricated prototypes with different electrode designs and potential sensing applications are presented.

Original languageEnglish
Title of host publicationICALEO 2009 - 28th International Congress on Applications of Lasers and Electro-Optics, Congress Proceedings
Pages1194-1203
Number of pages10
Volume102
Publication statusPublished - 2009
Event28th International Congress on Applications of Lasers and Electro-Optics - Orlando, FL, United States
Duration: 2 Nov 20095 Nov 2009

Conference

Conference28th International Congress on Applications of Lasers and Electro-Optics
Abbreviated titleICALEO 2009
CountryUnited States
CityOrlando, FL
Period2/11/095/11/09

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  • Cite this

    Kloss, S., Lewis, R. W. C., Dent, A., Weston, N., Jonas, K., Bowen, C. R., Hand, D. P., & Shephard, J. D. (2009). Electrode ablation on piezoelectric ceramics by NS-pulsed laser ablation for sensor applications. In ICALEO 2009 - 28th International Congress on Applications of Lasers and Electro-Optics, Congress Proceedings (Vol. 102, pp. 1194-1203)