Electrode ablation on piezoelectric ceramics by NS-pulsed laser ablation for sensor applications

Stephan Kloss; R. W C Lewis; Andrew Dent; Nick Weston; Kevyn Jonas; Chris R. Bowen; Duncan P. Hand; Jonathan D. Shephard

Electrode ablation on piezoelectric ceramics by NS-pulsed laser ablation for sensor applications

Stephan Kloss, R. W C Lewis, Andrew Dent, Nick Weston, Kevyn Jonas, Chris R. Bowen, Duncan P. Hand, Jonathan D. Shephard

School of Engineering & Physical Sciences

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

1 Citation (Scopus)

Abstract

This paper discusses the formation of complex geometry electrode structures on piezoelectric ceramic substrates using nanosecond pulsed laser ablation. Optical microscopy, scanning electron microscopy and surface profiling are used to examine the impact of the laser ablation process onto the substrate material. The influence of laser power, pulse energy and scanning speed on electrode removal and potential substrate damage is discussed. Fabricated prototypes with different electrode designs and potential sensing applications are presented.

Original language	English
Title of host publication	ICALEO 2009 - 28th International Congress on Applications of Lasers and Electro-Optics, Congress Proceedings
Pages	1194-1203
Number of pages	10
Volume	102
Publication status	Published - 2009
Event	28th International Congress on Applications of Lasers and Electro-Optics - Orlando, FL, United States Duration: 2 Nov 2009 → 5 Nov 2009

Conference

Conference	28th International Congress on Applications of Lasers and Electro-Optics
Abbreviated title	ICALEO 2009
Country/Territory	United States
City	Orlando, FL
Period	2/11/09 → 5/11/09

Cite this

@inproceedings{bc49df689d1a448f9fabf74cf8771f64,

title = "Electrode ablation on piezoelectric ceramics by NS-pulsed laser ablation for sensor applications",

abstract = "This paper discusses the formation of complex geometry electrode structures on piezoelectric ceramic substrates using nanosecond pulsed laser ablation. Optical microscopy, scanning electron microscopy and surface profiling are used to examine the impact of the laser ablation process onto the substrate material. The influence of laser power, pulse energy and scanning speed on electrode removal and potential substrate damage is discussed. Fabricated prototypes with different electrode designs and potential sensing applications are presented.",

author = "Stephan Kloss and Lewis, {R. W C} and Andrew Dent and Nick Weston and Kevyn Jonas and Bowen, {Chris R.} and Hand, {Duncan P.} and Shephard, {Jonathan D.}",

year = "2009",

language = "English",

isbn = "9780912035598",

volume = "102",

pages = "1194--1203",

booktitle = "ICALEO 2009 - 28th International Congress on Applications of Lasers and Electro-Optics, Congress Proceedings",

note = "28th International Congress on Applications of Lasers and Electro-Optics, ICALEO 2009 ; Conference date: 02-11-2009 Through 05-11-2009",

}

Kloss, S, Lewis, RWC, Dent, A, Weston, N, Jonas, K, Bowen, CR, Hand, DP & Shephard, JD 2009, Electrode ablation on piezoelectric ceramics by NS-pulsed laser ablation for sensor applications. in ICALEO 2009 - 28th International Congress on Applications of Lasers and Electro-Optics, Congress Proceedings. vol. 102, pp. 1194-1203, 28th International Congress on Applications of Lasers and Electro-Optics, Orlando, FL, United States, 2/11/09.

Electrode ablation on piezoelectric ceramics by NS-pulsed laser ablation for sensor applications. / Kloss, Stephan; Lewis, R. W C; Dent, Andrew et al.
ICALEO 2009 - 28th International Congress on Applications of Lasers and Electro-Optics, Congress Proceedings. Vol. 102 2009. p. 1194-1203.

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

TY - GEN

T1 - Electrode ablation on piezoelectric ceramics by NS-pulsed laser ablation for sensor applications

AU - Kloss, Stephan

AU - Lewis, R. W C

AU - Dent, Andrew

AU - Weston, Nick

AU - Jonas, Kevyn

AU - Bowen, Chris R.

AU - Hand, Duncan P.

AU - Shephard, Jonathan D.

PY - 2009

Y1 - 2009

N2 - This paper discusses the formation of complex geometry electrode structures on piezoelectric ceramic substrates using nanosecond pulsed laser ablation. Optical microscopy, scanning electron microscopy and surface profiling are used to examine the impact of the laser ablation process onto the substrate material. The influence of laser power, pulse energy and scanning speed on electrode removal and potential substrate damage is discussed. Fabricated prototypes with different electrode designs and potential sensing applications are presented.

AB - This paper discusses the formation of complex geometry electrode structures on piezoelectric ceramic substrates using nanosecond pulsed laser ablation. Optical microscopy, scanning electron microscopy and surface profiling are used to examine the impact of the laser ablation process onto the substrate material. The influence of laser power, pulse energy and scanning speed on electrode removal and potential substrate damage is discussed. Fabricated prototypes with different electrode designs and potential sensing applications are presented.

UR - http://www.scopus.com/inward/record.url?scp=77953895074&partnerID=8YFLogxK

M3 - Conference contribution

SN - 9780912035598

VL - 102

SP - 1194

EP - 1203

BT - ICALEO 2009 - 28th International Congress on Applications of Lasers and Electro-Optics, Congress Proceedings

T2 - 28th International Congress on Applications of Lasers and Electro-Optics

Y2 - 2 November 2009 through 5 November 2009

ER -

Electrode ablation on piezoelectric ceramics by NS-pulsed laser ablation for sensor applications

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